Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting

Qi Wang, Hiroyuki Oguchi, Motoaki Hara, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We investigated the experimental conditions affecting degree of c-axis tilt angle, which is related to output power of piezoelectric energy harvesters, of the oriented aluminum nitride (AlN) thin films grown using electron cyclotron resonance (ECR) sputtering. The c-axis tilt angle of the AlN thin films deposited on silicon (100) substrates was measured by X-ray diffractometry with a 2-dimenaioanl detector (2D XRD). This study verified that 1) lowering the incident angle of the flux during thin film growth and 2) lower substrate temperature, and 3) increasing the buffer layer roughness are effective ways to increase the c-axis tilt angle of the AlN thin films.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages636-639
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - 2014
Externally publishedYes
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 2014 Jan 262014 Jan 30

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting'. Together they form a unique fingerprint.

  • Cite this

    Wang, Q., Oguchi, H., Hara, M., & Kuwano, H. (2014). Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 636-639). [6765721] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765721