TY - GEN
T1 - Ionic-liquid micro ion source array for flexyble concurrent MEMS process
AU - Suzuki, Tatsuya
AU - Hara, Motoaki
AU - Oguchi, Hiroyuki
AU - Kuwano, Hiroki
PY - 2013
Y1 - 2013
N2 - This paper reported a micro ion source array for flexible concurrent fabrication of micro devices. In this study, to simplify and facilitate to integrate the ion sources with high density, ionic liquid (IL) 1-ethyl-3-methl imidazolium tetrafluoroborate ([EMIM]-[BF4]) was applied to the source material of ions. A reservoir for this IL was integrated to the micro emitter array using silicon micromachining. As experimental results, emitting of the ion from the [EMIM]-[BF4] and volatilization of silicon fluoride when exposing the silicon wafer to the emitted ion could be confirmed.
AB - This paper reported a micro ion source array for flexible concurrent fabrication of micro devices. In this study, to simplify and facilitate to integrate the ion sources with high density, ionic liquid (IL) 1-ethyl-3-methl imidazolium tetrafluoroborate ([EMIM]-[BF4]) was applied to the source material of ions. A reservoir for this IL was integrated to the micro emitter array using silicon micromachining. As experimental results, emitting of the ion from the [EMIM]-[BF4] and volatilization of silicon fluoride when exposing the silicon wafer to the emitted ion could be confirmed.
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U2 - 10.1109/MEMSYS.2013.6474241
DO - 10.1109/MEMSYS.2013.6474241
M3 - Conference contribution
AN - SCOPUS:84875471618
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 315
EP - 318
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -