Ionic-liquid micro ion source array for flexyble concurrent MEMS process

Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper reported a micro ion source array for flexible concurrent fabrication of micro devices. In this study, to simplify and facilitate to integrate the ion sources with high density, ionic liquid (IL) 1-ethyl-3-methl imidazolium tetrafluoroborate ([EMIM]-[BF4]) was applied to the source material of ions. A reservoir for this IL was integrated to the micro emitter array using silicon micromachining. As experimental results, emitting of the ion from the [EMIM]-[BF4] and volatilization of silicon fluoride when exposing the silicon wafer to the emitted ion could be confirmed.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages315-318
Number of pages4
DOIs
Publication statusPublished - 2013
Externally publishedYes
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 2013 Jan 202013 Jan 24

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period13/1/2013/1/24

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Suzuki, T., Hara, M., Oguchi, H., & Kuwano, H. (2013). Ionic-liquid micro ion source array for flexyble concurrent MEMS process. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 315-318). [6474241] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474241