Laser beam lithographed micro-Fresnel lenses

Masamitsu Haruna, Masanobu Takahashi, Kohji Wakabayashi, Hiroshi Nishihara

Research output: Contribution to journalArticlepeer-review

Abstract

Laser beam lithography for micro-Fresnel lenses (MFLs) with blazed grooves is proposed and demonstrated including the system configuration and characteristics of the resulting lenses. The resolution is even better than that of electron-beam lithography in forming 1-μm deep relief gratings in resist. A laser beam lithographed MFL with a diameter as large as 9.6 mm is described as well as a compact MFL (N.A. 0.21) butt coupled to an optical waveguide. In these two distinct MFLs, nearly diffraction-limited spot sizes have been obtained with diffraction efficiencies of 50% or more. A specific MFL array used for an integrated optic laser Doppler velocimeter is also presented.
Original languageEnglish
Pages (from-to)5120-5126
JournalApplied Optics
Volume29
Issue number34
DOIs
Publication statusPublished - 1990 Dec 1

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