Laser Fabrication of Miniature Internal Thread in Glass Substrate

Hiroyuki Degawa, Noriaki Urano, Shigeki Matsuo

Research output: Contribution to journalArticle

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Abstract

Miniature internal threads (tapped holes) of S0.5 were fabricated in a glass substrate. Water-assisted laser drilling was applied for fabrication of the threads of S0.5 standard using a subnanosecond laser as a light source. The landscape of the inner surface of the threads was measured by a laser microscope, and showed reasonable agreement with the desired standard. As a proof of concept, a commercial external screw was fitted to the fabricated internal thread.
LanguageEnglish
Article number48
Number of pages6
JournalMicromachines
Volume8
Issue number2
DOIs
StatePublished - 2017 Feb 8

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Fabrication
Glass
Lasers
Substrates
Light sources
Drilling
Microscopes
Water

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Laser Fabrication of Miniature Internal Thread in Glass Substrate. / Degawa, Hiroyuki; Urano, Noriaki; Matsuo, Shigeki.

In: Micromachines, Vol. 8, No. 2, 48, 08.02.2017.

Research output: Contribution to journalArticle

Degawa, Hiroyuki ; Urano, Noriaki ; Matsuo, Shigeki. / Laser Fabrication of Miniature Internal Thread in Glass Substrate. In: Micromachines. 2017 ; Vol. 8, No. 2.
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