Laser micro fabrication of photoresist rod array using a microlens array

Shigeki Matsuo; Takashi Miyamoto; Takuro Tomita

doi:10.1109/CLEOPR.2005.1569869

Laser micro fabrication of photoresist rod array using a microlens array

Shigeki Matsuo, Takashi Miyamoto, Takuro Tomita

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.

Original language	English
Title of host publication	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Pages	1731-1732
Number of pages	2
DOIs	https://doi.org/10.1109/CLEOPR.2005.1569869
Publication status	Published - 2005 Dec 1
Externally published	Yes
Event	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, Japan Duration: 2005 Jul 11 → 2005 Jul 15

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	2005

Conference

Conference	Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Country/Territory	Japan
City	Tokyo
Period	05/7/11 → 05/7/15

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2005.1569869

Cite this

Laser micro fabrication of photoresist rod array using a microlens array. / Matsuo, Shigeki; Miyamoto, Takashi; Tomita, Takuro.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. 2005. p. 1731-1732 1569869 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Matsuo, S, Miyamoto, T & Tomita, T 2005, Laser micro fabrication of photoresist rod array using a microlens array. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005., 1569869, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2005, pp. 1731-1732, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005, Tokyo, Japan, 05/7/11. https://doi.org/10.1109/CLEOPR.2005.1569869

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abstract = "Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.",

author = "Shigeki Matsuo and Takashi Miyamoto and Takuro Tomita",

year = "2005",

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doi = "10.1109/CLEOPR.2005.1569869",

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note = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 ; Conference date: 11-07-2005 Through 15-07-2005",

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N2 - Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.

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M3 - Conference contribution

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ER -

Laser micro fabrication of photoresist rod array using a microlens array

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ASJC Scopus subject areas

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