Laser micro fabrication of photoresist rod array using a microlens array

Shigeki Matsuo, Takashi Miyamoto, Takuro Tomita

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.

Original languageEnglish
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Pages1731-1732
Number of pages2
Volume2005
DOIs
Publication statusPublished - 2005
Externally publishedYes
EventPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo
Duration: 2005 Jul 112005 Jul 15

Other

OtherPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
CityTokyo
Period05/7/1105/7/15

Fingerprint

photoresists
aspect ratio
rods
fabrication
lasers

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Matsuo, S., Miyamoto, T., & Tomita, T. (2005). Laser micro fabrication of photoresist rod array using a microlens array. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest (Vol. 2005, pp. 1731-1732). [1569869] https://doi.org/10.1109/CLEOPR.2005.1569869

Laser micro fabrication of photoresist rod array using a microlens array. / Matsuo, Shigeki; Miyamoto, Takashi; Tomita, Takuro.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 2005 2005. p. 1731-1732 1569869.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Matsuo, S, Miyamoto, T & Tomita, T 2005, Laser micro fabrication of photoresist rod array using a microlens array. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. vol. 2005, 1569869, pp. 1731-1732, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005, Tokyo, 05/7/11. https://doi.org/10.1109/CLEOPR.2005.1569869
Matsuo S, Miyamoto T, Tomita T. Laser micro fabrication of photoresist rod array using a microlens array. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 2005. 2005. p. 1731-1732. 1569869 https://doi.org/10.1109/CLEOPR.2005.1569869
Matsuo, Shigeki ; Miyamoto, Takashi ; Tomita, Takuro. / Laser micro fabrication of photoresist rod array using a microlens array. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 2005 2005. pp. 1731-1732
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