Laser micro fabrication of photoresist rod array using a microlens array

Shigeki Matsuo, Takashi Miyamoto, Takuro Tomita

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.

Original languageEnglish
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Pages1731-1732
Number of pages2
DOIs
Publication statusPublished - 2005 Dec 1
EventPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, Japan
Duration: 2005 Jul 112005 Jul 15

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume2005

Conference

ConferencePacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
CountryJapan
CityTokyo
Period05/7/1105/7/15

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Matsuo, S., Miyamoto, T., & Tomita, T. (2005). Laser micro fabrication of photoresist rod array using a microlens array. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 (pp. 1731-1732). [1569869] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2005). https://doi.org/10.1109/CLEOPR.2005.1569869