Laser micro-fabrication/manipulation of dielectric materials

Hiroaki Misawa, Saulius Juodkazis, Andrius Marcinkevićius, Vygantas Mizeikis, Akira Yamaguchi, Hongbo Sun, Shigeki Matsuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

We describe microfabrication of various materials by multi-photon absorption (MPA) of femtosecond (120-150 fs) light pulses. The photo-modification at the focal point of tightly focused laser beam occurs inherently within volume smaller than that defined by the diffraction limit. The achievable lateral resolution is compared with that obtainable by lithography which uses near-field optical microscopy (NSOM). This technique can in principle lead to the realization of 3D optical memory and photonic crystals (PhC) with arbitrary lattice in polymers and silica glass, 3D prototyping in polymerizable resins, and etching of 3D structures guided by the optically damaged pattern in silica. Another topic also discussed in this work deals with laser micromanipulation using continuos wave (cw) laser operating at 1.06 μm. Light-controlled revolution of liquid crystal droplet and volume-phase transition of gel will be described.

Original languageEnglish
Title of host publicationProceedings of the International Symposium on Micro Machine and Human Science
Pages23-33
Number of pages11
Publication statusPublished - 2000
Externally publishedYes
EventProceedings of the 2000 International Symposium on Micromechatronics and Human Science -
Duration: 2000 Oct 222000 Oct 25

Other

OtherProceedings of the 2000 International Symposium on Micromechatronics and Human Science
Period00/10/2200/10/25

Fingerprint

Microfabrication
Near field scanning optical microscopy
Optical data storage
Lasers
Fused silica
Photonic crystals
Crystal lattices
Liquid crystals
Lithography
Optical microscopy
Laser beams
Etching
Gels
Photons
Resins
Diffraction
Phase transitions
Silica
Polymers

Keywords

  • Microfabrication
  • Near-field optical microscopy
  • Photo-polymerization
  • Photonic crystals
  • Three-dimensional optical memory

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Misawa, H., Juodkazis, S., Marcinkevićius, A., Mizeikis, V., Yamaguchi, A., Sun, H., & Matsuo, S. (2000). Laser micro-fabrication/manipulation of dielectric materials. In Proceedings of the International Symposium on Micro Machine and Human Science (pp. 23-33)

Laser micro-fabrication/manipulation of dielectric materials. / Misawa, Hiroaki; Juodkazis, Saulius; Marcinkevićius, Andrius; Mizeikis, Vygantas; Yamaguchi, Akira; Sun, Hongbo; Matsuo, Shigeki.

Proceedings of the International Symposium on Micro Machine and Human Science. 2000. p. 23-33.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Misawa, H, Juodkazis, S, Marcinkevićius, A, Mizeikis, V, Yamaguchi, A, Sun, H & Matsuo, S 2000, Laser micro-fabrication/manipulation of dielectric materials. in Proceedings of the International Symposium on Micro Machine and Human Science. pp. 23-33, Proceedings of the 2000 International Symposium on Micromechatronics and Human Science, 00/10/22.
Misawa H, Juodkazis S, Marcinkevićius A, Mizeikis V, Yamaguchi A, Sun H et al. Laser micro-fabrication/manipulation of dielectric materials. In Proceedings of the International Symposium on Micro Machine and Human Science. 2000. p. 23-33
Misawa, Hiroaki ; Juodkazis, Saulius ; Marcinkevićius, Andrius ; Mizeikis, Vygantas ; Yamaguchi, Akira ; Sun, Hongbo ; Matsuo, Shigeki. / Laser micro-fabrication/manipulation of dielectric materials. Proceedings of the International Symposium on Micro Machine and Human Science. 2000. pp. 23-33
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