Laser micro-fabrication/manipulation of dielectric materials

Hiroaki Misawa, Saulius Juodkazis, Andrius Marcinkevićius, Vygantas Mizeikis, Akira Yamaguchi, Hongbo Sun, Shigeki Matsuo

Research output: Contribution to conferencePaper

Abstract

We describe microfabrication of various materials by multi-photon absorption (MPA) of femtosecond (120-150 fs) light pulses. The photo-modification at the focal point of tightly focused laser beam occurs inherently within volume smaller than that defined by the diffraction limit. The achievable lateral resolution is compared with that obtainable by lithography which uses near-field optical microscopy (NSOM). This technique can in principle lead to the realization of 3D optical memory and photonic crystals (PhC) with arbitrary lattice in polymers and silica glass, 3D prototyping in polymerizable resins, and etching of 3D structures guided by the optically damaged pattern in silica. Another topic also discussed in this work deals with laser micromanipulation using continuos wave (cw) laser operating at 1.06 μm. Light-controlled revolution of liquid crystal droplet and volume-phase transition of gel will be described.

Original languageEnglish
Pages23-33
Number of pages11
Publication statusPublished - 2000 Dec 1
EventProceedings of the 2000 International Symposium on Micromechatronics and Human Science - , United States
Duration: 2000 Oct 222000 Oct 25

Conference

ConferenceProceedings of the 2000 International Symposium on Micromechatronics and Human Science
CountryUnited States
Period00/10/2200/10/25

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Keywords

  • Microfabrication
  • Near-field optical microscopy
  • Photo-polymerization
  • Photonic crystals
  • Three-dimensional optical memory

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Misawa, H., Juodkazis, S., Marcinkevićius, A., Mizeikis, V., Yamaguchi, A., Sun, H., & Matsuo, S. (2000). Laser micro-fabrication/manipulation of dielectric materials. 23-33. Paper presented at Proceedings of the 2000 International Symposium on Micromechatronics and Human Science, United States.