Liquid sensing system based on two port SH-SAW resonator

T. Nomura, A. Saitoh, Y. Horikoshi, S. Furukawa

Research output: Contribution to journalConference article


A new liquid flow sensing system constructed with SH-SAW resonator was used to characterize the liquid properties. Surface acoustic waves with the shear horizontal displacement (SH-SAW) have been used for sensing the properties in liquid phase. The SH-SAW resonator having two port was fabricated on a 36 rotated Y cut X prop. LiTaO 3 (36 YX LiTaO 3) substrate. The flow of a sample liquid was precisely controlled by a liquid chromatography system. The transit responses were detected as a sensor response by the two-port SAW resonator. The results showed a specific feature and used to determine the properties of liquid.

Original languageEnglish
Pages (from-to)477-480
Number of pages4
JournalProceedings of the IEEE Ultrasonics Symposium
Publication statusPublished - 1999 Dec 1
Event1999 IEEE Ultrasonics Symposium - Caesars Tahoe, NV, USA
Duration: 1999 Oct 171999 Oct 20


ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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