Abstract
A new liquid flow sensing system constructed with SH-SAW resonator was used to characterize the liquid properties. Surface acoustic waves with the shear horizontal displacement (SH-SAW) have been used for sensing the properties in liquid phase. The SH-SAW resonator having two port was fabricated on a 36 rotated Y cut X prop. LiTaO 3 (36 YX LiTaO 3) substrate. The flow of a sample liquid was precisely controlled by a liquid chromatography system. The transit responses were detected as a sensor response by the two-port SAW resonator. The results showed a specific feature and used to determine the properties of liquid.
| Original language | English |
|---|---|
| Pages (from-to) | 477-480 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE Ultrasonics Symposium |
| Volume | 1 |
| Publication status | Published - 1999 Dec 1 |
| Event | 1999 IEEE Ultrasonics Symposium - Caesars Tahoe, NV, USA Duration: 1999 Oct 17 → 1999 Oct 20 |
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ASJC Scopus subject areas
- Acoustics and Ultrasonics
Cite this
Nomura, T., Saitoh, A., Horikoshi, Y., & Furukawa, S. (1999). Liquid sensing system based on two port SH-SAW resonator. Proceedings of the IEEE Ultrasonics Symposium, 1, 477-480.