A new liquid flow sensing system constructed with SH-SAW resonator was used to characterize the liquid properties. Surface acoustic waves with the shear horizontal displacement (SH-SAW) have been used for sensing the properties in liquid phase. The SH-SAW resonator having two port was fabricated on a 36 rotated Y cut X prop. LiTaO 3 (36 YX LiTaO 3) substrate. The flow of a sample liquid was precisely controlled by a liquid chromatography system. The transit responses were detected as a sensor response by the two-port SAW resonator. The results showed a specific feature and used to determine the properties of liquid.
ASJC Scopus subject areas
- Acoustics and Ultrasonics