Liquid sensor probe using reflecting SH-SAW delay line

T. Nomura, A. Saitoh, T. Miyazaki

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

A new liquid sensor probe has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect the SAW. Multi-channel reflecting SAW delay lines were constructed on the substrate. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in liquid phase. A sensing system configuration is also suggested for the effective operation of the sensor probe. An electronic circuits system for accurately measuring the phase characteristics of the reflected wave and for detecting the output from the multi-channel SAW sensor probe was shown.

Original languageEnglish
Pages (from-to)298-302
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume91
Issue number1-3
DOIs
Publication statusPublished - 2003 Jun 1

Keywords

  • Multi-channel sensor
  • Reflecting SAW delay line
  • SAW sensor
  • SH-SAW
  • Surface acoustic wave

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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