Liquid Sensor System Using Reflecting Surface Acoustic Wave Delay Lines

Tooru Nomura, Atsushi Saitoh

Research output: Contribution to conferencePaper

4 Citations (Scopus)

Abstract

A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.

Original languageEnglish
Pages507-510
Number of pages4
Publication statusPublished - 2002 Dec 1
EventFirst IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States
Duration: 2002 Jun 122002 Jun 14

Conference

ConferenceFirst IEEE International Conference on Sensors - IEEE Sensors 2002
CountryUnited States
CityOrlando, FL
Period02/6/1202/6/14

Keywords

  • Liquid sensor
  • Reflecting SH-SAW delay line
  • SAW sensor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Nomura, T., & Saitoh, A. (2002). Liquid Sensor System Using Reflecting Surface Acoustic Wave Delay Lines. 507-510. Paper presented at First IEEE International Conference on Sensors - IEEE Sensors 2002, Orlando, FL, United States.