Abstract
A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.
| Original language | English |
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| Pages | 507-510 |
| Number of pages | 4 |
| Publication status | Published - 2002 Dec 1 |
| Event | First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States Duration: 2002 Jun 12 → 2002 Jun 14 |
Conference
| Conference | First IEEE International Conference on Sensors - IEEE Sensors 2002 |
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| Country | United States |
| City | Orlando, FL |
| Period | 02/6/12 → 02/6/14 |
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Keywords
- Liquid sensor
- Reflecting SH-SAW delay line
- SAW sensor
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
Nomura, T., & Saitoh, A. (2002). Liquid Sensor System Using Reflecting Surface Acoustic Wave Delay Lines. 507-510. Paper presented at First IEEE International Conference on Sensors - IEEE Sensors 2002, Orlando, FL, United States.