Abstract
A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of IEEE Sensors |
| Pages | 507-510 |
| Number of pages | 4 |
| Volume | 1 |
| Edition | 1 |
| Publication status | Published - 2002 |
| Event | First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL Duration: 2002 Jun 12 → 2002 Jun 14 |
Other
| Other | First IEEE International Conference on Sensors - IEEE Sensors 2002 |
|---|---|
| City | Orlando, FL |
| Period | 02/6/12 → 02/6/14 |
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Keywords
- Liquid sensor
- Reflecting SH-SAW delay line
- SAW sensor
ASJC Scopus subject areas
- Engineering (miscellaneous)
- Electrical and Electronic Engineering
Cite this
Liquid Sensor System Using Reflecting Surface Acoustic Wave Delay Lines. / Nomura, Tooru; Saitoh, Atsushi.
Proceedings of IEEE Sensors. Vol. 1 1. ed. 2002. p. 507-510.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Liquid Sensor System Using Reflecting Surface Acoustic Wave Delay Lines
AU - Nomura, Tooru
AU - Saitoh, Atsushi
PY - 2002
Y1 - 2002
N2 - A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.
AB - A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.
KW - Liquid sensor
KW - Reflecting SH-SAW delay line
KW - SAW sensor
UR - http://www.scopus.com/inward/record.url?scp=1542271627&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=1542271627&partnerID=8YFLogxK
M3 - Conference contribution
VL - 1
SP - 507
EP - 510
BT - Proceedings of IEEE Sensors
ER -