Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures

H. Nishikawa; Y. Furuta; N. Uchiya; J. Haga; M. Oikawa; T. Satoh; Y. Ishii; T. Kamiya

doi:10.1109/IMNC.2007.4456107

Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures

H. Nishikawa, Y. Furuta, N. Uchiya, J. Haga, M. Oikawa, T. Satoh, Y. Ishii, T. Kamiya

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We demonstrated fabrication of high-aspect ratio structures by proton beam writing on positive and negative resists. High aspect ratio up to 20 and smallest feature size up to 130 nm were achieved. The depth of machining is controlled so accurately by the beam injection energy. We succeeded in the production of three dimension micro-structures, 'Arch of Triumph', by double drawing on the same resist-sample by two kinds of microbeams with different energies and with different patterns. This shows a unique feature of the PBW as a micromachining tool for multilevel microstructures.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	66-67
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456107
Publication status	Published - 2007 Dec 1
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	07/11/5 → 07/11/8

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2007.4456107

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Nishikawa, H., Furuta, Y., Uchiya, N., Haga, J., Oikawa, M., Satoh, T., Ishii, Y., & Kamiya, T. (2007). Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 66-67). [4456107] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456107

Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. / Nishikawa, H.; Furuta, Y.; Uchiya, N. et al.

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 66-67 4456107 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nishikawa, H, Furuta, Y, Uchiya, N, Haga, J, Oikawa, M, Satoh, T, Ishii, Y & Kamiya, T 2007, Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456107, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 66-67, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07/11/5. https://doi.org/10.1109/IMNC.2007.4456107

Nishikawa H, Furuta Y, Uchiya N, Haga J, Oikawa M, Satoh T et al. Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 66-67. 4456107. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456107

Nishikawa, H. ; Furuta, Y. ; Uchiya, N. et al. / Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 66-67 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

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abstract = "We demonstrated fabrication of high-aspect ratio structures by proton beam writing on positive and negative resists. High aspect ratio up to 20 and smallest feature size up to 130 nm were achieved. The depth of machining is controlled so accurately by the beam injection energy. We succeeded in the production of three dimension micro-structures, 'Arch of Triumph', by double drawing on the same resist-sample by two kinds of microbeams with different energies and with different patterns. This shows a unique feature of the PBW as a micromachining tool for multilevel microstructures.",

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AU - Satoh, T.

AU - Ishii, Y.

AU - Kamiya, T.

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AB - We demonstrated fabrication of high-aspect ratio structures by proton beam writing on positive and negative resists. High aspect ratio up to 20 and smallest feature size up to 130 nm were achieved. The depth of machining is controlled so accurately by the beam injection energy. We succeeded in the production of three dimension micro-structures, 'Arch of Triumph', by double drawing on the same resist-sample by two kinds of microbeams with different energies and with different patterns. This shows a unique feature of the PBW as a micromachining tool for multilevel microstructures.

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Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures

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