Loss increase of (LuNdBi)3(FeAl)5O12 films caused by sputter etching

Hideki Yokoi, Tetsuya Mizumoto, Takehiro Ida, Kazuki Kozakai, Yoshiyuki Naito

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Rib waveguides, which are made of magnetic garnet films of composition (LuNdBi)3(FeAl)5O12 (LNB), fabricated by Ar sputter etching have large propagation loss in comparison with LNB slab waveguides. X-ray photoelectron spectroscopy (XPS) is used to investigate chemical states of constituent elements existing in the surface layer where a Ti mask has been deposited during the etching process. The analysis shows that Fe chemical shift due to Ar+ ion bombardment can cause increase in the optical absorption loss, and hence the propagation loss. It is effective for suppressing the loss increase to employ a SiO2 mask deposited onto LNB film instead of a Ti mask.

Original languageEnglish
Pages (from-to)6355-6359
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume33
Issue number11
Publication statusPublished - 1994 Nov
Externally publishedYes

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Etching
etching
Masks
masks
Waveguides
waveguides
propagation
Garnets
Chemical shift
Ion bombardment
garnets
Light absorption
chemical equilibrium
bombardment
surface layers
slabs
optical absorption
X ray photoelectron spectroscopy
photoelectron spectroscopy
causes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Loss increase of (LuNdBi)3(FeAl)5O12 films caused by sputter etching. / Yokoi, Hideki; Mizumoto, Tetsuya; Ida, Takehiro; Kozakai, Kazuki; Naito, Yoshiyuki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 33, No. 11, 11.1994, p. 6355-6359.

Research output: Contribution to journalArticle

Yokoi, Hideki ; Mizumoto, Tetsuya ; Ida, Takehiro ; Kozakai, Kazuki ; Naito, Yoshiyuki. / Loss increase of (LuNdBi)3(FeAl)5O12 films caused by sputter etching. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 1994 ; Vol. 33, No. 11. pp. 6355-6359.
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