Low resistance copper via technology

Kazuyoshi Ueno, V. M. Donnelly, Y. Tsuchiya, H. Aoki

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Citations (Scopus)

Abstract

In order to reduce specific contact resistance at via/interconnect interface and to avoid device degradation with Cu diffusion into dielectrics, via cleaning technology is a critical issue for a scaled down Cu multilevel metallization. Effects of cleaning processes are investigated for CHF 3 plasma-etched SiO 2/SiN/Cu via-structures. Effects of dilute HF (DHF) cleaning, hydrogen plasma cleaning, oxygen plasma cleaning, hexafluoroacetylacetone (H(hfac)) vapor cleaning, and vacuum anneal cleaning are investigated using an angle-resolved x-ray photoelectron spectroscopy (XPS). Cu contamination removal using dilute oxalic acid (DOA) is investigated using total reflection x-ray fluorescence analysis (TRXRF). Based on the results, we developed an optimized cleaning sequence which consists of a brief oxygen plasma exposure, DHF dipping, followed by exposure to H(hfac) vapors. The cleaning sequence is effective in obtaining a clean dielectric surface and an oxide-free Cu surface at via bottom. Direct-contacted via structures were fabricated by a dual-damascene process using the cleaning sequence. The specific contact resistance reduces to 20% of the reported values. We expect that the via resistance is low enough to be used in 0.13 μm generation and beyond.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
Pages521-533
Number of pages13
Volume564
Publication statusPublished - 1999
Externally publishedYes

Fingerprint

Copper
Cleaning
Plasmas
Contact resistance
Vapors
Oxygen
Oxalic Acid
X rays
Hydrogen
Oxalic acid
Photoelectron spectroscopy
Metallizing
Oxides
Contamination
Fluorescence
Vacuum
Degradation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Ueno, K., Donnelly, V. M., Tsuchiya, Y., & Aoki, H. (1999). Low resistance copper via technology. In Materials Research Society Symposium - Proceedings (Vol. 564, pp. 521-533)

Low resistance copper via technology. / Ueno, Kazuyoshi; Donnelly, V. M.; Tsuchiya, Y.; Aoki, H.

Materials Research Society Symposium - Proceedings. Vol. 564 1999. p. 521-533.

Research output: Chapter in Book/Report/Conference proceedingChapter

Ueno, K, Donnelly, VM, Tsuchiya, Y & Aoki, H 1999, Low resistance copper via technology. in Materials Research Society Symposium - Proceedings. vol. 564, pp. 521-533.
Ueno K, Donnelly VM, Tsuchiya Y, Aoki H. Low resistance copper via technology. In Materials Research Society Symposium - Proceedings. Vol. 564. 1999. p. 521-533
Ueno, Kazuyoshi ; Donnelly, V. M. ; Tsuchiya, Y. ; Aoki, H. / Low resistance copper via technology. Materials Research Society Symposium - Proceedings. Vol. 564 1999. pp. 521-533
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