Low-resistance metal contacts to nanocarbon/cobalt interconnects

M. Takagi, H. Yano, T. Wakui, Y. Yamazaki, N. Sakuma, A. Kajita, T. Sakai;K.Ueno, Kazuyoshi Ueno

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	124-125
Journal	Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session
Publication status	Published - 2012 Oct 23

Cite this

@article{8dce76634cfa47a18999cdf127fff00f,

title = "Low-resistance metal contacts to nanocarbon/cobalt interconnects",

author = "M. Takagi and H. Yano and T. Wakui and Y. Yamazaki and N. Sakuma and A. Kajita and T. Sakai;K.Ueno and Kazuyoshi Ueno",

year = "2012",

month = oct,

day = "23",

language = "English",

pages = "124--125",

journal = "Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session",

}

TY - JOUR

T1 - Low-resistance metal contacts to nanocarbon/cobalt interconnects

AU - Takagi, M.

AU - Yano, H.

AU - Wakui, T.

AU - Yamazaki, Y.

AU - Sakuma, N.

AU - Kajita, A.

AU - Sakai;K.Ueno, T.

AU - Ueno, Kazuyoshi

PY - 2012/10/23

Y1 - 2012/10/23

M3 - Article

SP - 124

EP - 125

JO - Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session

JF - Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session

ER -