Low-resistance metal contacts to nanocarbon/cobalt interconnects

M. Takagi, H. Yano, T. Wakui, Y. Yamazaki, N. Sakuma, A. Kajita, T. Sakai;K.Ueno, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)124-125
JournalExtended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session
Publication statusPublished - 2012 Oct 23

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