Low-resistance metal contacts to nanocarbon/cobalt interconnects

M. Takagi, H. Yano, T. Wakui, Y. Yamazaki, N. Sakuma, A. Kajita, T. Sakai;K.Ueno, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)124-125
JournalExtended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session
Publication statusPublished - 2012 Oct 23

Cite this

Low-resistance metal contacts to nanocarbon/cobalt interconnects. / Takagi, M.; Yano, H.; Wakui, T.; Yamazaki, Y.; Sakuma, N.; Kajita, A.; Sakai;K.Ueno, T.; Ueno, Kazuyoshi.

In: Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session, 23.10.2012, p. 124-125.

Research output: Contribution to journalArticle

Takagi, M, Yano, H, Wakui, T, Yamazaki, Y, Sakuma, N, Kajita, A, Sakai;K.Ueno, T & Ueno, K 2012, 'Low-resistance metal contacts to nanocarbon/cobalt interconnects', Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session, pp. 124-125.
Takagi, M. ; Yano, H. ; Wakui, T. ; Yamazaki, Y. ; Sakuma, N. ; Kajita, A. ; Sakai;K.Ueno, T. ; Ueno, Kazuyoshi. / Low-resistance metal contacts to nanocarbon/cobalt interconnects. In: Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session. 2012 ; pp. 124-125.
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AU - Yano, H.

AU - Wakui, T.

AU - Yamazaki, Y.

AU - Sakuma, N.

AU - Kajita, A.

AU - Sakai;K.Ueno, T.

AU - Ueno, Kazuyoshi

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JO - Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session

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