Low-resistance metal contacts to nanocarbon/cobalt interconnects

M. Takagi, H. Yano, T. Wakui, Y. Yamazaki, N. Sakuma, A. Kajita, T. Sakai;K.Ueno, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)124-125
JournalExtended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session
Publication statusPublished - 2012 Oct 23

Cite this

Takagi, M., Yano, H., Wakui, T., Yamazaki, Y., Sakuma, N., Kajita, A., Sakai;K.Ueno, T., & Ueno, K. (2012). Low-resistance metal contacts to nanocarbon/cobalt interconnects. Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session, 124-125.