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Low temperature interlayer formation technology using a new siloxane polymer film
M. Suzuki,
T. Homma
, Y. Numasawa
Research output
:
Contribution to conference
›
Paper
›
peer-review
3
Citations (Scopus)
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Engineering & Materials Science
Polymer films
Silanes
Temperature
Annealing
Furnaces
Heat treatment
Organic polymers
Dielectric films
Oligomers
Thick films
Phosphorus
Chemical vapor deposition
Electric wiring
Ethanol
Carbon
Cracks