Low temperature plasma nitriding of inner surfaces in stainless steel mini-/micro-pipes and nozzles

Tatsuhiko Aizawa; Kenji Wasa

doi:10.3390/mi8050157

Low temperature plasma nitriding of inner surfaces in stainless steel mini-/micro-pipes and nozzles

Tatsuhiko Aizawa, Kenji Wasa

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Metallic miniature products have been highlighted as mini-/micro-structural components working as a precise mechanism, in dispensing systems, and in medical operations. In particular, the essential mechanical parts such as pipes and nozzles have strength and hardness sufﬁcient for ejecting viscous liquids, solders, and particles. A low-temperature plasma nitriding process was proposed as a surface treatment to improve the engineering durability of stainless steel mini-/micro-pipes and nozzles. Various analyses were performed to describe the inner nitriding process only, from the inner surface of pipes and nozzles to their depth in thickness. AISI316 pipes and AISI316/AISI304 nozzle specimens were used to demonstrate by plasma nitriding for 14.4 ks at 693 K that their inner surfaces had a hardness higher than 800 HV.

Original language	English
Article number	157
Journal	Micromachines
Volume	8
Issue number	5
DOIs	https://doi.org/10.3390/mi8050157
Publication status	Published - 2017

Keywords

Hardness
Hollow cathode device
Inner surfaces
Micro-fabrication
Mini-and micro-nozzles
Nitrogen interstitials
Plasma nitriding
Stainless steels

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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10.3390/mi8050157

Cite this

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title = "Low temperature plasma nitriding of inner surfaces in stainless steel mini-/micro-pipes and nozzles",

abstract = "Metallic miniature products have been highlighted as mini-/micro-structural components working as a precise mechanism, in dispensing systems, and in medical operations. In particular, the essential mechanical parts such as pipes and nozzles have strength and hardness sufﬁcient for ejecting viscous liquids, solders, and particles. A low-temperature plasma nitriding process was proposed as a surface treatment to improve the engineering durability of stainless steel mini-/micro-pipes and nozzles. Various analyses were performed to describe the inner nitriding process only, from the inner surface of pipes and nozzles to their depth in thickness. AISI316 pipes and AISI316/AISI304 nozzle specimens were used to demonstrate by plasma nitriding for 14.4 ks at 693 K that their inner surfaces had a hardness higher than 800 HV.",

keywords = "Hardness, Hollow cathode device, Inner surfaces, Micro-fabrication, Mini-and micro-nozzles, Nitrogen interstitials, Plasma nitriding, Stainless steels",

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doi = "10.3390/mi8050157",

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AU - Aizawa, Tatsuhiko

AU - Wasa, Kenji

PY - 2017

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N2 - Metallic miniature products have been highlighted as mini-/micro-structural components working as a precise mechanism, in dispensing systems, and in medical operations. In particular, the essential mechanical parts such as pipes and nozzles have strength and hardness sufﬁcient for ejecting viscous liquids, solders, and particles. A low-temperature plasma nitriding process was proposed as a surface treatment to improve the engineering durability of stainless steel mini-/micro-pipes and nozzles. Various analyses were performed to describe the inner nitriding process only, from the inner surface of pipes and nozzles to their depth in thickness. AISI316 pipes and AISI316/AISI304 nozzle specimens were used to demonstrate by plasma nitriding for 14.4 ks at 693 K that their inner surfaces had a hardness higher than 800 HV.

AB - Metallic miniature products have been highlighted as mini-/micro-structural components working as a precise mechanism, in dispensing systems, and in medical operations. In particular, the essential mechanical parts such as pipes and nozzles have strength and hardness sufﬁcient for ejecting viscous liquids, solders, and particles. A low-temperature plasma nitriding process was proposed as a surface treatment to improve the engineering durability of stainless steel mini-/micro-pipes and nozzles. Various analyses were performed to describe the inner nitriding process only, from the inner surface of pipes and nozzles to their depth in thickness. AISI316 pipes and AISI316/AISI304 nozzle specimens were used to demonstrate by plasma nitriding for 14.4 ks at 693 K that their inner surfaces had a hardness higher than 800 HV.

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KW - Hollow cathode device

KW - Inner surfaces

KW - Micro-fabrication

KW - Mini-and micro-nozzles

KW - Nitrogen interstitials

KW - Plasma nitriding

KW - Stainless steels

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Low temperature plasma nitriding of inner surfaces in stainless steel mini-/micro-pipes and nozzles

Abstract

Keywords

ASJC Scopus subject areas

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