Magnification of transportation range using non-contact acoustic levitation by connecting vibrating plates

Yoshiki Hashimoto, Yoshikazu Koike, Sadayuki Ueha

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The authors have identified a new acoustic phenomenon by which an object weighing several kilograms and having a planar shape can be levitated by radiation pressure above a set of vibrating plates. We propose to use this phenomenon for levitation and transportation systems for moving silicon wafers and liquid crystal devices (LCDs). In this report, the authors describe a method that increases the capability of the device to carry large objects by placing two vibrating plates in parallel and enlarges the transportation range by placing the vibrating plates in a series. The results show that a large object such as an LCD 250 mm square can be transported long distances limited only by the number of plates placed in series.

Original languageEnglish
Pages (from-to)3140-3145
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number5 SUPPL. B
Publication statusPublished - 1997 May
Externally publishedYes

Fingerprint

acoustic levitation
magnification
Liquid crystals
Acoustics
Weighing
Silicon wafers
liquid crystals
Radiation
levitation
radiation pressure
wafers
acoustics
silicon
crystals

Keywords

  • Acoustic levitation
  • Flexural vibration
  • Non-contact transportation
  • Radiation pressure
  • Standing wave
  • Traveling wave
  • Ultrasonic

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Engineering(all)

Cite this

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AB - The authors have identified a new acoustic phenomenon by which an object weighing several kilograms and having a planar shape can be levitated by radiation pressure above a set of vibrating plates. We propose to use this phenomenon for levitation and transportation systems for moving silicon wafers and liquid crystal devices (LCDs). In this report, the authors describe a method that increases the capability of the device to carry large objects by placing two vibrating plates in parallel and enlarges the transportation range by placing the vibrating plates in a series. The results show that a large object such as an LCD 250 mm square can be transported long distances limited only by the number of plates placed in series.

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