Maskless gray scale lithography and its 3D microfluidic applications

Yoko Yamanishi, Takuma Nakano, Yu Sawada, Kazuyoshi Itoga, Teruo Okano, Fumihito Arai

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 μm. The 3D microvalve prevents liquid leakage when the membrane is closed - difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.

Original languageEnglish
Pages (from-to)426-433
Number of pages8
JournalJournal of Robotics and Mechatronics
Volume23
Issue number3
Publication statusPublished - 2011 Jun
Externally publishedYes

Fingerprint

Microchannels
Microfluidics
Lithography
Leakage (fluid)
Photolithography
Photoresists
Masks
Throughput
Membranes
Fabrication
Liquids

Keywords

  • Cell manipulation
  • Grayscale lithography
  • Micro-valve
  • MicroTAS
  • Three-dimensional photolithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Computer Science(all)

Cite this

Yamanishi, Y., Nakano, T., Sawada, Y., Itoga, K., Okano, T., & Arai, F. (2011). Maskless gray scale lithography and its 3D microfluidic applications. Journal of Robotics and Mechatronics, 23(3), 426-433.

Maskless gray scale lithography and its 3D microfluidic applications. / Yamanishi, Yoko; Nakano, Takuma; Sawada, Yu; Itoga, Kazuyoshi; Okano, Teruo; Arai, Fumihito.

In: Journal of Robotics and Mechatronics, Vol. 23, No. 3, 06.2011, p. 426-433.

Research output: Contribution to journalArticle

Yamanishi, Y, Nakano, T, Sawada, Y, Itoga, K, Okano, T & Arai, F 2011, 'Maskless gray scale lithography and its 3D microfluidic applications', Journal of Robotics and Mechatronics, vol. 23, no. 3, pp. 426-433.
Yamanishi Y, Nakano T, Sawada Y, Itoga K, Okano T, Arai F. Maskless gray scale lithography and its 3D microfluidic applications. Journal of Robotics and Mechatronics. 2011 Jun;23(3):426-433.
Yamanishi, Yoko ; Nakano, Takuma ; Sawada, Yu ; Itoga, Kazuyoshi ; Okano, Teruo ; Arai, Fumihito. / Maskless gray scale lithography and its 3D microfluidic applications. In: Journal of Robotics and Mechatronics. 2011 ; Vol. 23, No. 3. pp. 426-433.
@article{2a7186c30e4742a08befcb13453bc0c6,
title = "Maskless gray scale lithography and its 3D microfluidic applications",
abstract = "This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 μm. The 3D microvalve prevents liquid leakage when the membrane is closed - difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.",
keywords = "Cell manipulation, Grayscale lithography, Micro-valve, MicroTAS, Three-dimensional photolithography",
author = "Yoko Yamanishi and Takuma Nakano and Yu Sawada and Kazuyoshi Itoga and Teruo Okano and Fumihito Arai",
year = "2011",
month = "6",
language = "English",
volume = "23",
pages = "426--433",
journal = "Journal of Robotics and Mechatronics",
issn = "0915-3942",
publisher = "Fuji Technology Press",
number = "3",

}

TY - JOUR

T1 - Maskless gray scale lithography and its 3D microfluidic applications

AU - Yamanishi, Yoko

AU - Nakano, Takuma

AU - Sawada, Yu

AU - Itoga, Kazuyoshi

AU - Okano, Teruo

AU - Arai, Fumihito

PY - 2011/6

Y1 - 2011/6

N2 - This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 μm. The 3D microvalve prevents liquid leakage when the membrane is closed - difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.

AB - This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 μm. The 3D microvalve prevents liquid leakage when the membrane is closed - difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.

KW - Cell manipulation

KW - Grayscale lithography

KW - Micro-valve

KW - MicroTAS

KW - Three-dimensional photolithography

UR - http://www.scopus.com/inward/record.url?scp=84856288993&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84856288993&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:84856288993

VL - 23

SP - 426

EP - 433

JO - Journal of Robotics and Mechatronics

JF - Journal of Robotics and Mechatronics

SN - 0915-3942

IS - 3

ER -