Maskless gray scale lithography and its 3D microfluidic applications

Yoko Yamanishi, Takuma Nakano, Yu Sawada, Kazuyoshi Itoga, Teruo Okano, Fumihito Arai

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 μm. The 3D microvalve prevents liquid leakage when the membrane is closed - difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.

Original languageEnglish
Pages (from-to)426-433
Number of pages8
JournalJournal of Robotics and Mechatronics
Volume23
Issue number3
DOIs
Publication statusPublished - 2011 Jun

Keywords

  • Cell manipulation
  • Grayscale lithography
  • Micro-valve
  • MicroTAS
  • Three-dimensional photolithography

ASJC Scopus subject areas

  • Computer Science(all)
  • Electrical and Electronic Engineering

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  • Cite this

    Yamanishi, Y., Nakano, T., Sawada, Y., Itoga, K., Okano, T., & Arai, F. (2011). Maskless gray scale lithography and its 3D microfluidic applications. Journal of Robotics and Mechatronics, 23(3), 426-433. https://doi.org/10.20965/jrm.2011.p0426