Mass flow sensor using dual SAW device

Tooru Nomura, Atushi Saitoh, Koichi Koyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The application of SAW devices to a thermometric mass flow rate meter with a reference channel for temperature compensation is presented. The sensor is composed of a delay line device with two channels, namely a reference channel that does not come in contact with the fluid and a sensing channel that makes contact with the fluid. The mass flow rate of gases can be obtained by measuring the temperature change of the device caused by drawing heat from the surface with constant temperature due to the fluid. The results obtained from flow rate measurements of several gases demonstrate that the proposed device is effective as a flow rate meter. Moreover, it is also shown that the response characteristics to mass flow rate changes and the response stability for fluids were improved by taking the phase difference between the signals of the reference channel and the sensing channel as the gas flow rate.

Original languageEnglish
Title of host publication2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS
Pages25-30
Number of pages6
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS - Geneva, Switzerland
Duration: 2007 May 292007 Jun 1

Publication series

NameProceedings of the IEEE International Frequency Control Symposium and Exposition

Conference

Conference2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS
CountrySwitzerland
CityGeneva
Period07/5/2907/6/1

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Nomura, T., Saitoh, A., & Koyama, K. (2007). Mass flow sensor using dual SAW device. In 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS (pp. 25-30). [4319023] (Proceedings of the IEEE International Frequency Control Symposium and Exposition). https://doi.org/10.1109/FREQ.2007.4319023