Mass flow sensor using dual SAW device

Tooru Nomura, Atsushi Saitoh, Koichi Koyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The application of SAW devices to a thermometric mass flow rate meter with a reference channel for temperature compensation is presented. The sensor is composed of a delay line device with two channels, namely a reference channel that does not come in contact with the fluid and a sensing channel that makes contact with the fluid. The mass flow rate of gases can be obtained by measuring the temperature change of the device caused by drawing heat from the surface with constant temperature due to the fluid. The results obtained from flow rate measurements of several gases demonstrate that the proposed device is effective as a flow rate meter. Moreover, it is also shown that the response characteristics to mass flow rate changes and the response stability for fluids were improved by taking the phase difference between the signals of the reference channel and the sensing channel as the gas flow rate.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Frequency Control Symposium and Exposition
Pages25-30
Number of pages6
DOIs
Publication statusPublished - 2007
Event2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS - Geneva
Duration: 2007 May 292007 Jun 1

Other

Other2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS
CityGeneva
Period07/5/2907/6/1

Fingerprint

Flow rate
Sensors
Fluids
Contacts (fluid mechanics)
Electric delay lines
Gases
Temperature
Flow of gases

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Nomura, T., Saitoh, A., & Koyama, K. (2007). Mass flow sensor using dual SAW device. In Proceedings of the IEEE International Frequency Control Symposium and Exposition (pp. 25-30). [4319023] https://doi.org/10.1109/FREQ.2007.4319023

Mass flow sensor using dual SAW device. / Nomura, Tooru; Saitoh, Atsushi; Koyama, Koichi.

Proceedings of the IEEE International Frequency Control Symposium and Exposition. 2007. p. 25-30 4319023.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nomura, T, Saitoh, A & Koyama, K 2007, Mass flow sensor using dual SAW device. in Proceedings of the IEEE International Frequency Control Symposium and Exposition., 4319023, pp. 25-30, 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS, Geneva, 07/5/29. https://doi.org/10.1109/FREQ.2007.4319023
Nomura T, Saitoh A, Koyama K. Mass flow sensor using dual SAW device. In Proceedings of the IEEE International Frequency Control Symposium and Exposition. 2007. p. 25-30. 4319023 https://doi.org/10.1109/FREQ.2007.4319023
Nomura, Tooru ; Saitoh, Atsushi ; Koyama, Koichi. / Mass flow sensor using dual SAW device. Proceedings of the IEEE International Frequency Control Symposium and Exposition. 2007. pp. 25-30
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