Master-slice 3D MMIC

Tsuneo Tokumitsu, Makoto Hirano, Ichihiko Toyoda, Kenjiro Nishikawa, Chikara Yamaguchi, Masayoshi Aikawa

Research output: Contribution to journalArticle

Abstract

NTT has developed a novel Master-Slice three-dimensional MMIC technology involving the masterslice concept in the 3D MMIC structure. This technology enables the fabrication of high-density, microwave and millimeter-wave semicustom MMICs that was unsuccessful in conventional planar MMICs. Areas of around 2 × 2 mm, each of which has transistors, resistors and capacitor electrodes closely located, are fabricated in advance over a masterslice wafer, and each area is selectively covered by ground metal to create a space wide enough for the 3D circuits stacked above it. Using this methodology, we achieved a turn-around-time half that of conventional MMICs. This technology is also applied successfully to low-cost Si wafers. Hence, the technology shows excellent potential for more widespread application of MMICs.

Original languageEnglish
Pages (from-to)1293-1299
Number of pages7
JournalNTT R and D
Volume45
Issue number12
Publication statusPublished - 1996
Externally publishedYes

Fingerprint

Monolithic microwave integrated circuits
Turnaround time
Millimeter waves
Resistors
Transistors
Capacitors
Microwaves
Fabrication
Electrodes
Networks (circuits)
Metals
Costs

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Tokumitsu, T., Hirano, M., Toyoda, I., Nishikawa, K., Yamaguchi, C., & Aikawa, M. (1996). Master-slice 3D MMIC. NTT R and D, 45(12), 1293-1299.

Master-slice 3D MMIC. / Tokumitsu, Tsuneo; Hirano, Makoto; Toyoda, Ichihiko; Nishikawa, Kenjiro; Yamaguchi, Chikara; Aikawa, Masayoshi.

In: NTT R and D, Vol. 45, No. 12, 1996, p. 1293-1299.

Research output: Contribution to journalArticle

Tokumitsu, T, Hirano, M, Toyoda, I, Nishikawa, K, Yamaguchi, C & Aikawa, M 1996, 'Master-slice 3D MMIC', NTT R and D, vol. 45, no. 12, pp. 1293-1299.
Tokumitsu T, Hirano M, Toyoda I, Nishikawa K, Yamaguchi C, Aikawa M. Master-slice 3D MMIC. NTT R and D. 1996;45(12):1293-1299.
Tokumitsu, Tsuneo ; Hirano, Makoto ; Toyoda, Ichihiko ; Nishikawa, Kenjiro ; Yamaguchi, Chikara ; Aikawa, Masayoshi. / Master-slice 3D MMIC. In: NTT R and D. 1996 ; Vol. 45, No. 12. pp. 1293-1299.
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