Mechanical properties of zirconium films prepared by ion-beam assisted deposition

A. Mitsuo, T. Mori, Y. Setsuhara, S. Miyake, T. Aizawa

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

Zirconium nitride films were prepared by ion-beam assisted deposition on single-crystal silicon substrates. The films were synthesized by depositing the zirconium vapor from an electron-beam source, under the irradiation of nitrogen ions from an arc ion source. Transport ratio of Zr to N was varied from 1.0 to 3.0 by controlling the deposition rate of Zr. The ion beam density was kept constant, 0.2 mA/cm2. The ion beam energy was varied between 0.5 and 2.0 keV. The films were characterized by X-ray diffraction (XRD) and Auger electron spectroscopy. Hardness of the films was measured by the nano-indentation tester. The tribological behavior of films was evaluated by the ball-and-disk tribometer, under the normal load of 2 N and the relative sliding speed of 10 mm/s. The steel balls were used as a counter material. Formation of ZrN was recognized in XRD pattern for all deposition conditions. Depth profiles measured by X-ray photoelectron spectroscopy showed that the composition ratio of Zr to N was uniform in the inside of film. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films are also discussed.

Original languageEnglish
Pages (from-to)366-370
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume206
DOIs
Publication statusPublished - 2003 May
Externally publishedYes

Fingerprint

Ion beam assisted deposition
Zirconium
ion beams
mechanical properties
Mechanical properties
Ion beams
balls
hardness
Hardness
zirconium nitrides
X ray diffraction
tribometers
x rays
nitrogen ions
Steel
Silicon
Ion sources
Nanoindentation
Auger electron spectroscopy
nanoindentation

Keywords

  • Friction coefficient
  • Hardness
  • Ion beam assisted deposition
  • Thin film
  • Zirconium
  • Zirconium nitride

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Mechanical properties of zirconium films prepared by ion-beam assisted deposition. / Mitsuo, A.; Mori, T.; Setsuhara, Y.; Miyake, S.; Aizawa, T.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 206, 05.2003, p. 366-370.

Research output: Contribution to journalArticle

@article{e223ec972ddf422c963f21cc65de49e8,
title = "Mechanical properties of zirconium films prepared by ion-beam assisted deposition",
abstract = "Zirconium nitride films were prepared by ion-beam assisted deposition on single-crystal silicon substrates. The films were synthesized by depositing the zirconium vapor from an electron-beam source, under the irradiation of nitrogen ions from an arc ion source. Transport ratio of Zr to N was varied from 1.0 to 3.0 by controlling the deposition rate of Zr. The ion beam density was kept constant, 0.2 mA/cm2. The ion beam energy was varied between 0.5 and 2.0 keV. The films were characterized by X-ray diffraction (XRD) and Auger electron spectroscopy. Hardness of the films was measured by the nano-indentation tester. The tribological behavior of films was evaluated by the ball-and-disk tribometer, under the normal load of 2 N and the relative sliding speed of 10 mm/s. The steel balls were used as a counter material. Formation of ZrN was recognized in XRD pattern for all deposition conditions. Depth profiles measured by X-ray photoelectron spectroscopy showed that the composition ratio of Zr to N was uniform in the inside of film. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films are also discussed.",
keywords = "Friction coefficient, Hardness, Ion beam assisted deposition, Thin film, Zirconium, Zirconium nitride",
author = "A. Mitsuo and T. Mori and Y. Setsuhara and S. Miyake and T. Aizawa",
year = "2003",
month = "5",
doi = "10.1016/S0168-583X(03)00764-X",
language = "English",
volume = "206",
pages = "366--370",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

TY - JOUR

T1 - Mechanical properties of zirconium films prepared by ion-beam assisted deposition

AU - Mitsuo, A.

AU - Mori, T.

AU - Setsuhara, Y.

AU - Miyake, S.

AU - Aizawa, T.

PY - 2003/5

Y1 - 2003/5

N2 - Zirconium nitride films were prepared by ion-beam assisted deposition on single-crystal silicon substrates. The films were synthesized by depositing the zirconium vapor from an electron-beam source, under the irradiation of nitrogen ions from an arc ion source. Transport ratio of Zr to N was varied from 1.0 to 3.0 by controlling the deposition rate of Zr. The ion beam density was kept constant, 0.2 mA/cm2. The ion beam energy was varied between 0.5 and 2.0 keV. The films were characterized by X-ray diffraction (XRD) and Auger electron spectroscopy. Hardness of the films was measured by the nano-indentation tester. The tribological behavior of films was evaluated by the ball-and-disk tribometer, under the normal load of 2 N and the relative sliding speed of 10 mm/s. The steel balls were used as a counter material. Formation of ZrN was recognized in XRD pattern for all deposition conditions. Depth profiles measured by X-ray photoelectron spectroscopy showed that the composition ratio of Zr to N was uniform in the inside of film. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films are also discussed.

AB - Zirconium nitride films were prepared by ion-beam assisted deposition on single-crystal silicon substrates. The films were synthesized by depositing the zirconium vapor from an electron-beam source, under the irradiation of nitrogen ions from an arc ion source. Transport ratio of Zr to N was varied from 1.0 to 3.0 by controlling the deposition rate of Zr. The ion beam density was kept constant, 0.2 mA/cm2. The ion beam energy was varied between 0.5 and 2.0 keV. The films were characterized by X-ray diffraction (XRD) and Auger electron spectroscopy. Hardness of the films was measured by the nano-indentation tester. The tribological behavior of films was evaluated by the ball-and-disk tribometer, under the normal load of 2 N and the relative sliding speed of 10 mm/s. The steel balls were used as a counter material. Formation of ZrN was recognized in XRD pattern for all deposition conditions. Depth profiles measured by X-ray photoelectron spectroscopy showed that the composition ratio of Zr to N was uniform in the inside of film. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films are also discussed.

KW - Friction coefficient

KW - Hardness

KW - Ion beam assisted deposition

KW - Thin film

KW - Zirconium

KW - Zirconium nitride

UR - http://www.scopus.com/inward/record.url?scp=0038582279&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038582279&partnerID=8YFLogxK

U2 - 10.1016/S0168-583X(03)00764-X

DO - 10.1016/S0168-583X(03)00764-X

M3 - Article

AN - SCOPUS:0038582279

VL - 206

SP - 366

EP - 370

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -