Abstract
Zirconium nitride films were prepared by ion-beam assisted deposition on single-crystal silicon substrates. The films were synthesized by depositing the zirconium vapor from an electron-beam source, under the irradiation of nitrogen ions from an arc ion source. Transport ratio of Zr to N was varied from 1.0 to 3.0 by controlling the deposition rate of Zr. The ion beam density was kept constant, 0.2 mA/cm2. The ion beam energy was varied between 0.5 and 2.0 keV. The films were characterized by X-ray diffraction (XRD) and Auger electron spectroscopy. Hardness of the films was measured by the nano-indentation tester. The tribological behavior of films was evaluated by the ball-and-disk tribometer, under the normal load of 2 N and the relative sliding speed of 10 mm/s. The steel balls were used as a counter material. Formation of ZrN was recognized in XRD pattern for all deposition conditions. Depth profiles measured by X-ray photoelectron spectroscopy showed that the composition ratio of Zr to N was uniform in the inside of film. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films are also discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 366-370 |
| Number of pages | 5 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 206 |
| DOIs | |
| Publication status | Published - 2003 May |
| Externally published | Yes |
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Keywords
- Friction coefficient
- Hardness
- Ion beam assisted deposition
- Thin film
- Zirconium
- Zirconium nitride
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Instrumentation
- Surfaces and Interfaces
Cite this
Mechanical properties of zirconium films prepared by ion-beam assisted deposition. / Mitsuo, A.; Mori, T.; Setsuhara, Y.; Miyake, S.; Aizawa, T.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 206, 05.2003, p. 366-370.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Mechanical properties of zirconium films prepared by ion-beam assisted deposition
AU - Mitsuo, A.
AU - Mori, T.
AU - Setsuhara, Y.
AU - Miyake, S.
AU - Aizawa, T.
PY - 2003/5
Y1 - 2003/5
N2 - Zirconium nitride films were prepared by ion-beam assisted deposition on single-crystal silicon substrates. The films were synthesized by depositing the zirconium vapor from an electron-beam source, under the irradiation of nitrogen ions from an arc ion source. Transport ratio of Zr to N was varied from 1.0 to 3.0 by controlling the deposition rate of Zr. The ion beam density was kept constant, 0.2 mA/cm2. The ion beam energy was varied between 0.5 and 2.0 keV. The films were characterized by X-ray diffraction (XRD) and Auger electron spectroscopy. Hardness of the films was measured by the nano-indentation tester. The tribological behavior of films was evaluated by the ball-and-disk tribometer, under the normal load of 2 N and the relative sliding speed of 10 mm/s. The steel balls were used as a counter material. Formation of ZrN was recognized in XRD pattern for all deposition conditions. Depth profiles measured by X-ray photoelectron spectroscopy showed that the composition ratio of Zr to N was uniform in the inside of film. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films are also discussed.
AB - Zirconium nitride films were prepared by ion-beam assisted deposition on single-crystal silicon substrates. The films were synthesized by depositing the zirconium vapor from an electron-beam source, under the irradiation of nitrogen ions from an arc ion source. Transport ratio of Zr to N was varied from 1.0 to 3.0 by controlling the deposition rate of Zr. The ion beam density was kept constant, 0.2 mA/cm2. The ion beam energy was varied between 0.5 and 2.0 keV. The films were characterized by X-ray diffraction (XRD) and Auger electron spectroscopy. Hardness of the films was measured by the nano-indentation tester. The tribological behavior of films was evaluated by the ball-and-disk tribometer, under the normal load of 2 N and the relative sliding speed of 10 mm/s. The steel balls were used as a counter material. Formation of ZrN was recognized in XRD pattern for all deposition conditions. Depth profiles measured by X-ray photoelectron spectroscopy showed that the composition ratio of Zr to N was uniform in the inside of film. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films are also discussed.
KW - Friction coefficient
KW - Hardness
KW - Ion beam assisted deposition
KW - Thin film
KW - Zirconium
KW - Zirconium nitride
UR - http://www.scopus.com/inward/record.url?scp=0038582279&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0038582279&partnerID=8YFLogxK
U2 - 10.1016/S0168-583X(03)00764-X
DO - 10.1016/S0168-583X(03)00764-X
M3 - Article
VL - 206
SP - 366
EP - 370
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
ER -