Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation

Y. Arai, Y. Ohki, K. Saito, Hiroyuki Nishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a result carried out in order to clarify the applicability of ion irradiation effects to polymer materials used for optical waveguides. We irradiated 950-keV He + ions or 1.0-MeV H + ions to a fluorinated polyimide film to a fluence between 1 × 10 14 and 7 × 10 16 cm -2, and the film surface was scanned by a profilometer. The depth of a dent induced by the irradiation increases with an increase in the fluence. From the depth of the dent, the projected range of the He + ions, and the Lorentz-Lorenz equation, the refractive index of the ion-irradiated region was found to increase by 2.9 %. This value agrees with the increment in refractive index measured by spectroscopic ellipsometry, which also increases as the fluence increases. Furthermore, the increment in refractive index, 0.21 %, induced by the irradiation of H + ions to the fluence of 1 × 10 15 cm -2 is comparable to the value, 0.35 %, observed when H + ions of a similar fluence were irradiated to SiO 2 glass. Therefore, it is natural to assume that the ion irradiation to the polymer can be a good tool to fabricate a high-performance polymer-based optical waveguide.

Original languageEnglish
Title of host publicationAnnual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP
Pages705-708
Number of pages4
DOIs
Publication statusPublished - 2012
Event2012 IEEE Conference on Electrical Insulation and Dielectric Phenomena, CEIDP 2012 - Montreal, QC, Canada
Duration: 2012 Oct 142012 Oct 17

Other

Other2012 IEEE Conference on Electrical Insulation and Dielectric Phenomena, CEIDP 2012
CountryCanada
CityMontreal, QC
Period12/10/1412/10/17

Fingerprint

Ion bombardment
Polyimides
Refractive index
Ions
Polymers
Optical waveguides
Irradiation
Spectroscopic ellipsometry
Glass

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Arai, Y., Ohki, Y., Saito, K., & Nishikawa, H. (2012). Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. In Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP (pp. 705-708). [6378878] https://doi.org/10.1109/CEIDP.2012.6378878

Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. / Arai, Y.; Ohki, Y.; Saito, K.; Nishikawa, Hiroyuki.

Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP. 2012. p. 705-708 6378878.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Arai, Y, Ohki, Y, Saito, K & Nishikawa, H 2012, Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. in Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP., 6378878, pp. 705-708, 2012 IEEE Conference on Electrical Insulation and Dielectric Phenomena, CEIDP 2012, Montreal, QC, Canada, 12/10/14. https://doi.org/10.1109/CEIDP.2012.6378878
Arai Y, Ohki Y, Saito K, Nishikawa H. Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. In Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP. 2012. p. 705-708. 6378878 https://doi.org/10.1109/CEIDP.2012.6378878
Arai, Y. ; Ohki, Y. ; Saito, K. ; Nishikawa, Hiroyuki. / Mechanism and application of refractive index increase induced in fluorinated polyimide by ion irradiation. Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP. 2012. pp. 705-708
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