Mechanisms of crystalline iron oxide formation in electron beam-induced deposition

Masayuki Shimojo, Masaki Takeguchi, Kazutaka Mitsuishi, Miyoko Tanaka, Kazuo Furuya

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The effects of water vapor and oxygen addition to an iron pentacarbonyl precursor on the formation of iron oxide deposits were studied to understand the mechanism of iron oxide formation in electron beam-induced deposition. The water vapor addition markedly reduced the carbon content in the deposits and led to the formation of crystalline iron oxide. However, the oxygen addition had little effect on the composition and structure of the deposits. This suggests that iron acts as a catalyst and a chemical reaction similar to the water gas reaction occurs during the electron beam-induced deposition.

Original languageEnglish
Pages (from-to)6247-6249
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number9 B
DOIs
Publication statusPublished - 2007 Sep 20
Externally publishedYes

Keywords

  • Electron beam-induced deposition
  • Iron oxide
  • Iron pentacarbonyl
  • Nanofabruication
  • Oxygen
  • Water vapor

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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