Abstract
The effects of water vapor and oxygen addition to an iron pentacarbonyl precursor on the formation of iron oxide deposits were studied to understand the mechanism of iron oxide formation in electron beam-induced deposition. The water vapor addition markedly reduced the carbon content in the deposits and led to the formation of crystalline iron oxide. However, the oxygen addition had little effect on the composition and structure of the deposits. This suggests that iron acts as a catalyst and a chemical reaction similar to the water gas reaction occurs during the electron beam-induced deposition.
| Original language | English |
|---|---|
| Pages (from-to) | 6247-6249 |
| Number of pages | 3 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 46 |
| Issue number | 9 B |
| DOIs | |
| Publication status | Published - 2007 Sept 20 |
| Externally published | Yes |
Keywords
- Electron beam-induced deposition
- Iron oxide
- Iron pentacarbonyl
- Nanofabruication
- Oxygen
- Water vapor
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)