Mechanisms of nano-hole drilling due to nano-probe Intense electron beam irradiation on a stainless steel

S. Bysakh, Masayuki Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Holes with diameters of a few nanometers were drilled in a stainless steel foil using intense electron beams of 2.4 nm nominal probe size from a field-emission electron gun in a high-resolution transmission electron microscope. Drilling experiments were carried out at regions of different foil thicknesses for different durations using three different condenser lens apertures. A better understanding of the mechanisms of nano-hole drilling by nano-probe electron beams has been achieved in this article. It was observed that the drilling process initiates from the bottom surface of a thin region while it initiates from the top surface for a thick region. It is concluded that material removal during nano-hole drilling is mainly by localized vaporization within the foil and drilling progresses through the formation of a row of interconnected nano-voids along the irradiated volume across the foil thickness.

Original languageEnglish
Pages (from-to)2620-2627
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number6
DOIs
Publication statusPublished - 2004 Nov
Externally publishedYes

Fingerprint

drilling
stainless steels
Electron beams
Drilling
Stainless steel
Metal foil
Irradiation
electron beams
foils
irradiation
probes
Electron guns
electron guns
condensers
Vaporization
machining
Field emission
voids
field emission
Lenses

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

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abstract = "Holes with diameters of a few nanometers were drilled in a stainless steel foil using intense electron beams of 2.4 nm nominal probe size from a field-emission electron gun in a high-resolution transmission electron microscope. Drilling experiments were carried out at regions of different foil thicknesses for different durations using three different condenser lens apertures. A better understanding of the mechanisms of nano-hole drilling by nano-probe electron beams has been achieved in this article. It was observed that the drilling process initiates from the bottom surface of a thin region while it initiates from the top surface for a thick region. It is concluded that material removal during nano-hole drilling is mainly by localized vaporization within the foil and drilling progresses through the formation of a row of interconnected nano-voids along the irradiated volume across the foil thickness.",
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AU - Shimojo, Masayuki

AU - Mitsuishi, K.

AU - Furuya, K.

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