MEMS Electric Power Generator Using a Piezoelectric PZT Thin Film Cantilever

Shinya Ishikawa, Kazumasa Shibata, Katsuhiro Tanaka, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)265-268
JournalProceedings of PowerMEMS2008+μEMS2008
Publication statusPublished - 2008 Apr 1

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