MEMS Electric Power Generator Using a Piezoelectric PZT Thin Film Cantilever

Shinya Ishikawa, Kazumasa Shibata, Katsuhiro Tanaka, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)265-268
JournalProceedings of PowerMEMS2008+μEMS2008
Publication statusPublished - 2008 Apr 1

Cite this

MEMS Electric Power Generator Using a Piezoelectric PZT Thin Film Cantilever. / Ishikawa, Shinya; Shibata, Kazumasa; Tanaka, Katsuhiro; Nagasawa, Sumito; Kuwano, Hiroki.

In: Proceedings of PowerMEMS2008+μEMS2008, 01.04.2008, p. 265-268.

Research output: Contribution to journalArticle

Ishikawa, Shinya ; Shibata, Kazumasa ; Tanaka, Katsuhiro ; Nagasawa, Sumito ; Kuwano, Hiroki. / MEMS Electric Power Generator Using a Piezoelectric PZT Thin Film Cantilever. In: Proceedings of PowerMEMS2008+μEMS2008. 2008 ; pp. 265-268.
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