MEMS fabrication of compliant sheet for micro hexapod robots

Micro hexapod robots are desirable tools for exploring hazardous environments such as areas affected by natural disasters. Our objective is to reduce the cost of fabricating micro hexapod robots and contribute to their mass production. Conventionally, when the micro robot is assembled, it is necessary to handle, align, and assemble the micro parts, and these processes increase the fabrication cost. We propose a fabrication system in which the robot is assembled from one compliant sheet fabricated using MEMS processes. This method can streamline the processes of handling and aligning the micro parts. The joint element of the robot is composed of a compliant hinge, and the joints are driven by shape memory alloy (SMA) actuators. In this study, we assembled a hexapod robot from one compliant sheet fabricated by the MEMS processes. Furthermore, SMA actuators were attached to the robot, and testing of the joints was performed.