Abstract
This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Pages | 858-861 |
| Number of pages | 4 |
| Volume | 2006 |
| Publication status | Published - 2006 |
| Externally published | Yes |
| Event | 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul Duration: 2006 Jan 22 → 2006 Jan 26 |
Other
| Other | 19th IEEE International Conference on Micro Electro Mechanical Systems |
|---|---|
| City | Istanbul |
| Period | 06/1/22 → 06/1/26 |
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ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering
Cite this
MEMS tunable optical filter using auto-cloned photonic crystal. / Nagasawa, Sumito; Onuki, T.; Ohtera, Y.; Kuwano, H.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006 2006. p. 858-861 1627935.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - MEMS tunable optical filter using auto-cloned photonic crystal
AU - Nagasawa, Sumito
AU - Onuki, T.
AU - Ohtera, Y.
AU - Kuwano, H.
PY - 2006
Y1 - 2006
N2 - This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.
AB - This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.
UR - http://www.scopus.com/inward/record.url?scp=33750109709&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33750109709&partnerID=8YFLogxK
M3 - Conference contribution
SN - 0780394755
SN - 9780780394759
VL - 2006
SP - 858
EP - 861
BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ER -