MEMS tunable optical filter using auto-cloned photonic crystal

Sumito Nagasawa, T. Onuki, Y. Ohtera, H. Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages858-861
Number of pages4
Volume2006
Publication statusPublished - 2006
Externally publishedYes
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul
Duration: 2006 Jan 222006 Jan 26

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CityIstanbul
Period06/1/2206/1/26

Fingerprint

Optical filters
Photonic crystals
MEMS
Photonic band gap
Cloning
Productivity
Availability
Substrates

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Nagasawa, S., Onuki, T., Ohtera, Y., & Kuwano, H. (2006). MEMS tunable optical filter using auto-cloned photonic crystal. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 2006, pp. 858-861). [1627935]

MEMS tunable optical filter using auto-cloned photonic crystal. / Nagasawa, Sumito; Onuki, T.; Ohtera, Y.; Kuwano, H.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006 2006. p. 858-861 1627935.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nagasawa, S, Onuki, T, Ohtera, Y & Kuwano, H 2006, MEMS tunable optical filter using auto-cloned photonic crystal. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). vol. 2006, 1627935, pp. 858-861, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, 06/1/22.
Nagasawa S, Onuki T, Ohtera Y, Kuwano H. MEMS tunable optical filter using auto-cloned photonic crystal. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006. 2006. p. 858-861. 1627935
Nagasawa, Sumito ; Onuki, T. ; Ohtera, Y. ; Kuwano, H. / MEMS tunable optical filter using auto-cloned photonic crystal. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2006 2006. pp. 858-861
@inproceedings{becf910e457e448b856661d0b17a4253,
title = "MEMS tunable optical filter using auto-cloned photonic crystal",
abstract = "This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.",
author = "Sumito Nagasawa and T. Onuki and Y. Ohtera and H. Kuwano",
year = "2006",
language = "English",
isbn = "0780394755",
volume = "2006",
pages = "858--861",
booktitle = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

}

TY - GEN

T1 - MEMS tunable optical filter using auto-cloned photonic crystal

AU - Nagasawa, Sumito

AU - Onuki, T.

AU - Ohtera, Y.

AU - Kuwano, H.

PY - 2006

Y1 - 2006

N2 - This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.

AB - This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=33750109709&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33750109709&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33750109709

SN - 0780394755

SN - 9780780394759

VL - 2006

SP - 858

EP - 861

BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ER -