Micro Electric Power Generation Using A Micro Cantilever with PZT Thin Film

Kazumasa Shibata, Hiroki Kuwano, Sumito Nagasawa, Katsuhiro Tanaka

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)13
JournalProceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication statusPublished - 2007 Apr 1

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