Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester

K. Shibata, S. Ishikawa, K. Tanaka, Sumito Nagasawa, Z. Cao, H. Oguchi, M. Hara, H. Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We developed a micro fabrication process of vibration-based sputtered PZT micro energy harvester with a proof mass. A PZT film as a piezoelectric material is formed on a cantilever by using sputtering. An electric power is generated because of piezoelectric effect when the cantilever is bended and stressed. The device is fabricated on a Si substrate by MEMS techniques. The cantilever had 1200 μm in length, 600 μm in width, and 50 μm in thickness on the Si substrate. Also, a PZT thin film free standing cantilever was successfully fabricated. A proof mass with 0.42 mg in weight was fabricated on both top of Si substrate cantilever and PZT thin film free standing cantilever. Dynamic and static frequency characteristics and output power generation were experimented by using a shaker and a network analyzer for characterizing the device. The resonant frequency of the Si cantilever was 8.81 kHz. We achieved 418 pW output power at the resonant frequency.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event11th IEEE SENSORS 2012 Conference - Taipei
Duration: 2012 Oct 282012 Oct 31

Other

Other11th IEEE SENSORS 2012 Conference
CityTaipei
Period12/10/2812/10/31

Fingerprint

Harvesters
Microfabrication
Thin films
Natural frequencies
Substrates
Piezoelectricity
Electric network analyzers
Piezoelectric materials
MEMS
Power generation
Sputtering

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Shibata, K., Ishikawa, S., Tanaka, K., Nagasawa, S., Cao, Z., Oguchi, H., ... Kuwano, H. (2012). Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester. In Proceedings of IEEE Sensors [6411532] https://doi.org/10.1109/ICSENS.2012.6411532

Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester. / Shibata, K.; Ishikawa, S.; Tanaka, K.; Nagasawa, Sumito; Cao, Z.; Oguchi, H.; Hara, M.; Kuwano, H.

Proceedings of IEEE Sensors. 2012. 6411532.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shibata, K, Ishikawa, S, Tanaka, K, Nagasawa, S, Cao, Z, Oguchi, H, Hara, M & Kuwano, H 2012, Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester. in Proceedings of IEEE Sensors., 6411532, 11th IEEE SENSORS 2012 Conference, Taipei, 12/10/28. https://doi.org/10.1109/ICSENS.2012.6411532
Shibata K, Ishikawa S, Tanaka K, Nagasawa S, Cao Z, Oguchi H et al. Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester. In Proceedings of IEEE Sensors. 2012. 6411532 https://doi.org/10.1109/ICSENS.2012.6411532
Shibata, K. ; Ishikawa, S. ; Tanaka, K. ; Nagasawa, Sumito ; Cao, Z. ; Oguchi, H. ; Hara, M. ; Kuwano, H. / Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester. Proceedings of IEEE Sensors. 2012.
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