Micro fabrication of poly L lacid and its application

Yoshikazu Koike, Hitoshi Takeuchi, Hiroki Hagiwara, Tomoki Ogura, Daichi Aoki, Ken Kumagai, Taku Ishikawa, Hiroyuki Nishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Poly L lactic acid (PLLA) is attracted a great deal of attention. Because PLLA is a plant-derived plastic and is a bio-compatible one. And also, PLLA has piezoelectricity. Therefore, it is expected that the use of PLLA reduces environmental load in piezoelectric sensors and actuators for consumer applications. For sensor and actuator applications, Micro Electro Mechanical Systems (MEMS) technologies are important. In the fabrication of MEMS by PLLA, ion beam irradiation is consider to be a valuable tool for maskless patterning of high-aspect-ratio structures in the micro- and nanoscale. Proton Beam Writing (PBW) is also expected to apply for the micro fabrication process. In this report, PBW is applied for the micro fabrication of PLLA (poly L lactic acid) polymers which is piezoelectric polymers, plant derivative and has bio-adaptability. PLLA bulk and film are irradiated with 1MeV proton beam (PB). After beam irradiation, the samples are developed by ammonia liquid as the developing solution. As a result, the micro line of 3μm in width and 20μm in depth is fabricated successfully. Finally, the basic piezoelectric polymer actuator is fabricated.

Original languageEnglish
Title of host publication1st IEEE Global Conference on Consumer Electronics 2012, GCCE 2012
Pages60-61
Number of pages2
DOIs
Publication statusPublished - 2012
Event1st IEEE Global Conference on Consumer Electronics, GCCE 2012 - Tokyo
Duration: 2012 Oct 22012 Oct 5

Other

Other1st IEEE Global Conference on Consumer Electronics, GCCE 2012
CityTokyo
Period12/10/212/10/5

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Keywords

  • micro actuator
  • piezoelectric actuator
  • poly L lacid
  • polymerpiezo-electricity
  • proton beam writing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Koike, Y., Takeuchi, H., Hagiwara, H., Ogura, T., Aoki, D., Kumagai, K., ... Nishikawa, H. (2012). Micro fabrication of poly L lacid and its application. In 1st IEEE Global Conference on Consumer Electronics 2012, GCCE 2012 (pp. 60-61). [6379929] https://doi.org/10.1109/GCCE.2012.6379929