Micro-machined micro ion source for flexible and concurrent MEMS process

Shinya Tamonoki, Tomoyuki Ueda, Masahiko Kurotsu, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Abstract

We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.

Original languageEnglish
Pages (from-to)1902-1904
Number of pages3
JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume76
Issue number768
Publication statusPublished - 2010 Aug
Externally publishedYes

Fingerprint

Ion sources
MEMS
Ion beams
Machining

Keywords

  • Ion beam
  • Mems (micro electro-mechanical system)
  • Micro machining
  • Nano &

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials
  • Industrial and Manufacturing Engineering

Cite this

Micro-machined micro ion source for flexible and concurrent MEMS process. / Tamonoki, Shinya; Ueda, Tomoyuki; Kurotsu, Masahiko; Nagasawa, Sumito; Kuwano, Hiroki.

In: Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, Vol. 76, No. 768, 08.2010, p. 1902-1904.

Research output: Contribution to journalArticle

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