Micro-machined micro ion source for flexible and concurrent MEMS process

Shinya Tamonoki; Tomoyuki Ueda; Masahiko Kurotsu; Sumito Nagasawa; Hiroki Kuwano

doi:10.1299/kikaic.76.1902

Micro-machined micro ion source for flexible and concurrent MEMS process

Shinya Tamonoki, Tomoyuki Ueda, Masahiko Kurotsu, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journal › Article › peer-review

Abstract

We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.

Original language	English
Pages (from-to)	1902-1904
Number of pages	3
Journal	Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume	76
Issue number	768
DOIs	https://doi.org/10.1299/kikaic.76.1902
Publication status	Published - 2010 Aug
Externally published	Yes

Keywords

Ion beam
Mems (micro electro-mechanical system)
Micro machining
Nano &

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1299/kikaic.76.1902

Cite this

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abstract = "We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.",

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author = "Shinya Tamonoki and Tomoyuki Ueda and Masahiko Kurotsu and Sumito Nagasawa and Hiroki Kuwano",

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AU - Tamonoki, Shinya

AU - Ueda, Tomoyuki

AU - Kurotsu, Masahiko

AU - Nagasawa, Sumito

AU - Kuwano, Hiroki

PY - 2010/8

Y1 - 2010/8

N2 - We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.

AB - We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.

KW - Ion beam

KW - Mems (micro electro-mechanical system)

KW - Micro machining

KW - Nano &

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JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

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ER -

Micro-machined micro ion source for flexible and concurrent MEMS process

Abstract

Keywords

ASJC Scopus subject areas

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