Micro-machined micro ion source for flexible and concurrent process

S. Tamonoki, H. Kuwano, Sumito Nagasawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper a micro-machined micro ion source using B.K. (Barkhausen-Kurz) oscillation discharge to realize a high ion current is developed for flexible and concurrent MEMS processes. An ion beam with several μA from the micro ion source unit having φ1mmx4.37 mm discharge space was successfully generated.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages371-374
Number of pages4
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ
Duration: 2008 Jan 132008 Jan 17

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CityTucson, AZ
Period08/1/1308/1/17

Fingerprint

Ion sources
Ion beams
MEMS
Ions

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Tamonoki, S., Kuwano, H., & Nagasawa, S. (2008). Micro-machined micro ion source for flexible and concurrent process. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 371-374). [4443670] https://doi.org/10.1109/MEMSYS.2008.4443670

Micro-machined micro ion source for flexible and concurrent process. / Tamonoki, S.; Kuwano, H.; Nagasawa, Sumito.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 371-374 4443670.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tamonoki, S, Kuwano, H & Nagasawa, S 2008, Micro-machined micro ion source for flexible and concurrent process. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4443670, pp. 371-374, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443670
Tamonoki S, Kuwano H, Nagasawa S. Micro-machined micro ion source for flexible and concurrent process. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 371-374. 4443670 https://doi.org/10.1109/MEMSYS.2008.4443670
Tamonoki, S. ; Kuwano, H. ; Nagasawa, Sumito. / Micro-machined micro ion source for flexible and concurrent process. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. pp. 371-374
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