Micro-machined micro ion source for flexible and concurrent process

S. Tamonoki; H. Kuwano; S. Nagasawa

doi:10.1109/MEMSYS.2008.4443670

Micro-machined micro ion source for flexible and concurrent process

S. Tamonoki, H. Kuwano, S. Nagasawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

In this paper a micro-machined micro ion source using B.K. (Barkhausen-Kurz) oscillation discharge to realize a high ion current is developed for flexible and concurrent MEMS processes. An ion beam with several μA from the micro ion source unit having φ1mmx4.37 mm discharge space was successfully generated.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	371-374
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443670
Publication status	Published - 2008 Aug 29
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 2008 Jan 13 → 2008 Jan 17

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	08/1/13 → 08/1/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2008.4443670

Cite this

Tamonoki, S., Kuwano, H., & Nagasawa, S. (2008). Micro-machined micro ion source for flexible and concurrent process. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 371-374). [4443670] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443670

Micro-machined micro ion source for flexible and concurrent process. / Tamonoki, S.; Kuwano, H.; Nagasawa, S.

MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 371-374 4443670 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tamonoki, S, Kuwano, H & Nagasawa, S 2008, Micro-machined micro ion source for flexible and concurrent process. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443670, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 371-374, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443670

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AB - In this paper a micro-machined micro ion source using B.K. (Barkhausen-Kurz) oscillation discharge to realize a high ion current is developed for flexible and concurrent MEMS processes. An ion beam with several μA from the micro ion source unit having φ1mmx4.37 mm discharge space was successfully generated.

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Micro-machined micro ion source for flexible and concurrent process

Abstract

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Conference

ASJC Scopus subject areas

Access to Document

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