Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost

H. Kuwano, S. Tamonoki, S. Nagasawa

Research output: Contribution to journalArticle

Original languageEnglish
JournalProceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication statusPublished - 2007 Apr 1

Cite this

@article{25e3ea6dfa884cd9ab94c6585cf33e77,
title = "Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost",
author = "H. Kuwano and S. Tamonoki and S. Nagasawa",
year = "2007",
month = "4",
day = "1",
language = "English",
journal = "Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)",

}

TY - JOUR

T1 - Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost

AU - Kuwano, H.

AU - Tamonoki, S.

AU - Nagasawa, S.

PY - 2007/4/1

Y1 - 2007/4/1

M3 - Article

JO - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

JF - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

ER -