Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost

H. Kuwano, S. Tamonoki, S. Nagasawa

Research output: Contribution to journalArticle

Original languageEnglish
JournalProceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication statusPublished - 2007 Apr 1

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