Micro-Machined Micro Ion Source for MEMS Flexible Process

Shinya Tamonoki, Hiroki Kuwano, Sumito Nagasawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)627-630
JournalAbstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),
Publication statusPublished - 2007 Apr 1

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