Micro-Machined Micro Ion Source for MEMS Flexible Process

Shinya Tamonoki, Hiroki Kuwano, Sumito Nagasawa

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	627-630
Journal	Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),
Publication status	Published - 2007 Apr 1

Cite this

@article{2504911b275546559c9702db90a9167b,

title = "Micro-Machined Micro Ion Source for MEMS Flexible Process",

author = "Shinya Tamonoki and Hiroki Kuwano and Sumito Nagasawa",

year = "2007",

month = apr,

day = "1",

language = "English",

pages = "627--630",

journal = "Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),",

}