Micro-Machined Micro Ion Source for MEMS Flexible Process

Shinya Tamonoki, Hiroki Kuwano, Sumito Nagasawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)627-630
JournalAbstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),
Publication statusPublished - 2007 Apr 1

Cite this

Micro-Machined Micro Ion Source for MEMS Flexible Process. / Tamonoki, Shinya; Kuwano, Hiroki; Nagasawa, Sumito.

In: Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007), 01.04.2007, p. 627-630.

Research output: Contribution to journalArticle

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