Original language | English |
---|---|
Pages (from-to) | 627-630 |
Journal | Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007), |
Publication status | Published - 2007 Apr 1 |
Cite this
Tamonoki, S., Kuwano, H., & Nagasawa, S. (2007). Micro-Machined Micro Ion Source for MEMS Flexible Process. Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007), 627-630.
Micro-Machined Micro Ion Source for MEMS Flexible Process. / Tamonoki, Shinya; Kuwano, Hiroki; Nagasawa, Sumito.
In: Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007), 01.04.2007, p. 627-630.Research output: Contribution to journal › Article
Tamonoki, S, Kuwano, H & Nagasawa, S 2007, 'Micro-Machined Micro Ion Source for MEMS Flexible Process', Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007), pp. 627-630.
Tamonoki S, Kuwano H, Nagasawa S. Micro-Machined Micro Ion Source for MEMS Flexible Process. Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),. 2007 Apr 1;627-630.
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title = "Micro-Machined Micro Ion Source for MEMS Flexible Process",
author = "Shinya Tamonoki and Hiroki Kuwano and Sumito Nagasawa",
year = "2007",
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journal = "Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),",
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AU - Tamonoki, Shinya
AU - Kuwano, Hiroki
AU - Nagasawa, Sumito
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Y1 - 2007/4/1
M3 - Article
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EP - 630
JO - Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),
JF - Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007),
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