Original language | English |
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Pages (from-to) | 627-630 |
Journal | Abstract of The Int. Conference on Nanoscience and Technology (ICN+T2007), |
Publication status | Published - 2007 Apr 1 |
Micro-Machined Micro Ion Source for MEMS Flexible Process
Shinya Tamonoki, Hiroki Kuwano, Sumito Nagasawa
Research output: Contribution to journal › Article › peer-review