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Micro-machining of resists on silicon by proton beam writing
Naoyuki Uchiya, Takuya Harada, Masato Murai, Hiroyuki Nishikawa, Junji Haga, Takahiro Sato, Yasuyuki Ishii, Tomihiro Kamiya
Research output: Contribution to journal › Article › peer-review
43
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(Scopus)