Micro-Nano Lithography by MeV Ion Beam Writing

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Masashi Koka, Hiroyuki Nishikawa, Syu Seki

Research output: Contribution to journalArticle

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