Micro-patterning of Siloxane Films by Proton Beam Writing

Hiroyuki Nishikawa, Ryutaro Tsuchiya, Tetsuro Yasukawa, Tomoki Kaneko, Yusuke Furuta, Tomoji Ohishi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)239-243
JournalJournal of Photopolymer Science and Technology, Vol.22, pp.239-243(2009)
Volume22
Publication statusPublished - 2009 Jun 1

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