Micro-patterning of thick Siloxane films by Proton Beam Writing

Ryutaro Tsuchiya, Hiroyuki Nishikawa

Research output: Contribution to journal › Article

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2010 Dec 10

Cite this

Micro-patterning of thick Siloxane films by Proton Beam Writing. / Tsuchiya, Ryutaro; Nishikawa, Hiroyuki.

In: Default journal, 10.12.2010.

Research output: Contribution to journal › Article

Tsuchiya, R & Nishikawa, H 2010, 'Micro-patterning of thick Siloxane films by Proton Beam Writing', Default journal.
Tsuchiya R, Nishikawa H. Micro-patterning of thick Siloxane films by Proton Beam Writing. Default journal. 2010 Dec 10.
Tsuchiya, Ryutaro ; Nishikawa, Hiroyuki. / Micro-patterning of thick Siloxane films by Proton Beam Writing. In: Default journal. 2010.
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