Micro-patterning of thick Siloxane films by Proton Beam Writing

Ryutaro Tsuchiya, Hiroyuki Nishikawa

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2010 Dec 10

Cite this

Micro-patterning of thick Siloxane films by Proton Beam Writing. / Tsuchiya, Ryutaro; Nishikawa, Hiroyuki.

In: Default journal, 10.12.2010.

Research output: Contribution to journalArticle

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AU - Tsuchiya, Ryutaro

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