Original language | English |
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Pages (from-to) | 360-366 |
Journal | Proceedings of 7th Conference on MicroManufacturing |
Volume | 1 |
Publication status | Published - 2012 Mar 13 |
Micro-patterning onto DLC coating by plasma oxygen etching
T. Aizawa, E.E. Yunata, .T. Redationo, T. Fukuda
Research output: Contribution to journal › Article › peer-review