Micro-patterning onto DLC coating by plasma oxygen etching

T. Aizawa, E.E. Yunata, .T. Redationo, T. Fukuda

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)360-366
JournalProceedings of 7th Conference on MicroManufacturing
Volume1
Publication statusPublished - 2012 Mar 13

Cite this

Aizawa, T., Yunata, E. E., Redationo, . T., & Fukuda, T. (2012). Micro-patterning onto DLC coating by plasma oxygen etching. Proceedings of 7th Conference on MicroManufacturing, 1, 360-366.