Micro-patterning onto DLC coating by plasma oxygen etching

T. Aizawa, E.E. Yunata, .T. Redationo, T. Fukuda

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)360-366
JournalProceedings of 7th Conference on MicroManufacturing
Volume1
Publication statusPublished - 2012 Mar 13

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