Micro-patterning onto DLC coating by plasma oxygen etching

T. Aizawa, E.E. Yunata, .T. Redationo, T. Fukuda

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)360-366
JournalProceedings of 7th Conference on MicroManufacturing
Volume1
Publication statusPublished - 2012 Mar 13

Cite this

Aizawa, T., Yunata, E. E., Redationo, . T., & Fukuda, T. (2012). Micro-patterning onto DLC coating by plasma oxygen etching. Proceedings of 7th Conference on MicroManufacturing, 1, 360-366.

Micro-patterning onto DLC coating by plasma oxygen etching. / Aizawa, T.; Yunata, E.E.; Redationo, .T.; Fukuda, T.

In: Proceedings of 7th Conference on MicroManufacturing, Vol. 1, 13.03.2012, p. 360-366.

Research output: Contribution to journalArticle

Aizawa, T, Yunata, EE, Redationo, T & Fukuda, T 2012, 'Micro-patterning onto DLC coating by plasma oxygen etching', Proceedings of 7th Conference on MicroManufacturing, vol. 1, pp. 360-366.
Aizawa, T. ; Yunata, E.E. ; Redationo, .T. ; Fukuda, T. / Micro-patterning onto DLC coating by plasma oxygen etching. In: Proceedings of 7th Conference on MicroManufacturing. 2012 ; Vol. 1. pp. 360-366.
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