Micro-patterning onto DLC coating by plasma oxygen etching

T. Aizawa, E.E. Yunata, .T. Redationo, T. Fukuda

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	360-366
Journal	Proceedings of 7th Conference on MicroManufacturing
Volume	1
Publication status	Published - 2012 Mar 13

@article{c9537051778d427ba17e36f4263c2828,

title = "Micro-patterning onto DLC coating by plasma oxygen etching",

author = "T. Aizawa and E.E. Yunata and .T. Redationo and T. Fukuda",

year = "2012",

month = "3",

day = "13",

language = "English",

volume = "1",

pages = "360--366",

journal = "Proceedings of 7th Conference on MicroManufacturing",

}