| Original language | English |
|---|---|
| Pages (from-to) | 360-366 |
| Journal | Proceedings of 7th Conference on MicroManufacturing |
| Volume | 1 |
| Publication status | Published - 2012 Mar 13 |
Cite this
Aizawa, T., Yunata, E. E., Redationo, . T., & Fukuda, T. (2012). Micro-patterning onto DLC coating by plasma oxygen etching. Proceedings of 7th Conference on MicroManufacturing, 1, 360-366.
Micro-patterning onto DLC coating by plasma oxygen etching. / Aizawa, T.; Yunata, E.E.; Redationo, .T.; Fukuda, T.
In: Proceedings of 7th Conference on MicroManufacturing, Vol. 1, 13.03.2012, p. 360-366.Research output: Contribution to journal › Article
Aizawa, T, Yunata, EE, Redationo, T & Fukuda, T 2012, 'Micro-patterning onto DLC coating by plasma oxygen etching', Proceedings of 7th Conference on MicroManufacturing, vol. 1, pp. 360-366.
Aizawa T, Yunata EE, Redationo T, Fukuda T. Micro-patterning onto DLC coating by plasma oxygen etching. Proceedings of 7th Conference on MicroManufacturing. 2012 Mar 13;1:360-366.
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