Micro-stereolithography and its application to biochemical IC chip

Koji Ikuta, Shoji Maruo, Tadahiro Hasegawa, Takao Adachi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)360-374
JournalInternational Society for Optical Engineering
Publication statusPublished - 2001 Jan 1

Cite this

Micro-stereolithography and its application to biochemical IC chip. / Ikuta, Koji; Maruo, Shoji; Hasegawa, Tadahiro; Adachi, Takao.

In: International Society for Optical Engineering, 01.01.2001, p. 360-374.

Research output: Contribution to journalArticle

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