Micro-stereolithography and its application to biochemical IC chip

Koji Ikuta, Shoji Maruo, Tadahiro Hasegawa, Takao Adachi

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


The world's first micro stereo lithography named "IH process" was proposed and developed by the speaker in 1992. By now, several types of micro stereo lithography systems have been developed. Three dimensional resolution of solidification has reached to 0.2 micron at present. These 3D micro fabrication process using UV curable polymer gave a big impact on not only MEMS but also optics. The latest version of IH process enable us to make a movable micro mechanism without assemble process or sacrificial layer technique oftenly used in silicon process. It is well known that the IH process is the mother of wophoton micro stereo lithography and it's applications. Recently new micro chemical device named "Biochemical IC Chip" was proposed and developed by the speaker. This chip is based on the module IC chip-set like a today's I'lL family. IH process enable to make the biochemical IC including real three dimensional micro fluid channels. Various kind of Biochemical IC chips such as micro pump, switching valve, reactor, concentrator and detector have already been fabricated successfully. Basic performance of micro chemical devices constructed by the biochemical IC ships were demonstrated. The biochemical IC chips will open new bioscience and medicine based on innovative technology.

Original languageEnglish
Pages (from-to)360-374
Number of pages15
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001 Jun 29
Externally publishedYes
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing VI 2001 - San Jose, United States
Duration: 2001 Jan 202001 Jan 26


  • Biochemical JC chip
  • Hybrid JH process
  • JR process
  • Micro pump
  • Micro reactor
  • Micro stereolithograhy
  • Micro valve
  • Micro-TAS
  • Shape memory alloy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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