Micro structure of N-implanted Ti thin films prepared by ion beam sputtering deposition

Shinji Muraishi, Tatsuhiko Aizawa

Research output: Contribution to conference › Paper › peer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Micro structure of N-implanted Ti thin films prepared by ion beam sputtering deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds