Micro structure processing on plastics by accelerated hydrogen molecular ions

H. Hayashi, S. Hayakawa, Hiroyuki Nishikawa

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A proton has 1836 times the mass of an electron and is the lightest nucleus to be used for accelerator in material modification. We can setup accelerator with the lowest acceleration voltage. It is preferable characteristics of Proton Beam Writer (PBW) for industrial applications. On the contrary "proton" has the lowest charge among all nuclei and the potential impact to material is lowest. The object of this research is to improve productivity of the PBW for industry application focusing on hydrogen molecular ions. These ions are generated in the same ion source by ionizing hydrogen molecule. There is no specific ion source requested and it is suitable for industrial use. We demonstrated three dimensional (3D) multilevel micro structures on polyester base FPC (Flexible Printed Circuits) using proton, H2 + and H3 +. The reactivity of hydrogen molecular ions is much higher than that of proton and coincident with the level of expectation. We can apply this result to make micro devices of 3D multilevel structures on FPC.

Keywords

  • FPC
  • Hydrogen molecular ions
  • Micro device
  • PBW
  • Reactivity

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

Fingerprint Dive into the research topics of 'Micro structure processing on plastics by accelerated hydrogen molecular ions'. Together they form a unique fingerprint.

  • Cite this