Micro-structuring of epoxy resists containing nanoparticles by proton beam writing

Ryo Sano, Simon Hayakawa, Hidetaka Hayashi, Yasuyuki Ishii, Hiroyuki Nishikawa

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1 Citation (Scopus)

Abstract

Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14-750. nm) of silver, silica, alumina, and carbon with concentration of 5.0. wt% was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100. μm is possible by 3.0. MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0. wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10. μm in diameter and 80. μm in height by PBW at 3.0. MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.

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Proton beams
proton beams
Silver
silver
Nanoparticles
nanoparticles
sensitivity
Micromachining
micromachining
high aspect ratio
Aspect ratio
Nanocomposites
nanocomposites
Alumina
Agglomeration
aluminum oxides
Silica
silicon dioxide
Carbon
composite materials

Keywords

  • Epoxy
  • Nanocomposites
  • Nanoparticle
  • Proton beam writing
  • Resists

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

Cite this

@article{bcea1896774b49ca8e38f579539fec7f,
title = "Micro-structuring of epoxy resists containing nanoparticles by proton beam writing",
abstract = "Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14-750. nm) of silver, silica, alumina, and carbon with concentration of 5.0. wt{\%} was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100. μm is possible by 3.0. MeV PBW with increase in lateral straggling of less than 5.0{\%}. Sensitivity loss of 150{\%} was observed by introduction of 5.0. wt{\%} nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10. μm in diameter and 80. μm in height by PBW at 3.0. MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.",
keywords = "Epoxy, Nanocomposites, Nanoparticle, Proton beam writing, Resists",
author = "Ryo Sano and Simon Hayakawa and Hidetaka Hayashi and Yasuyuki Ishii and Hiroyuki Nishikawa",
year = "2016",
month = "8",
day = "31",
doi = "10.1016/j.nimb.2017.01.068",
language = "English",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

TY - JOUR

T1 - Micro-structuring of epoxy resists containing nanoparticles by proton beam writing

AU - Sano, Ryo

AU - Hayakawa, Simon

AU - Hayashi, Hidetaka

AU - Ishii, Yasuyuki

AU - Nishikawa, Hiroyuki

PY - 2016/8/31

Y1 - 2016/8/31

N2 - Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14-750. nm) of silver, silica, alumina, and carbon with concentration of 5.0. wt% was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100. μm is possible by 3.0. MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0. wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10. μm in diameter and 80. μm in height by PBW at 3.0. MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.

AB - Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14-750. nm) of silver, silica, alumina, and carbon with concentration of 5.0. wt% was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100. μm is possible by 3.0. MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0. wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10. μm in diameter and 80. μm in height by PBW at 3.0. MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.

KW - Epoxy

KW - Nanocomposites

KW - Nanoparticle

KW - Proton beam writing

KW - Resists

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U2 - 10.1016/j.nimb.2017.01.068

DO - 10.1016/j.nimb.2017.01.068

M3 - Article

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -