Micro-structuring of epoxy resists containing nanoparticles by proton beam writing

Ryo Sano, Simon Hayakawa, Hidetaka Hayashi, Yasuyuki Ishii, Hiroyuki Nishikawa

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14-750. nm) of silver, silica, alumina, and carbon with concentration of 5.0. wt% was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100. μm is possible by 3.0. MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0. wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10. μm in diameter and 80. μm in height by PBW at 3.0. MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.


  • Epoxy
  • Nanocomposites
  • Nanoparticle
  • Proton beam writing
  • Resists

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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