Micro-texturing into DLC/diamond coated molds and dies via high density oxygen plasma etching

Ersyzario Edo Yunata, Tatsuhiko Aizawa

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Diamond-Like Carbon (DLC) and Chemical Vapor Deposition (CVD)-diamond films have been widely utilized not only as a hard protective coating for molds and dies but also as a functional substrate for bio-MEMS/NEMS. Micro-texturing into these hard coated molds and dies provides a productive tool to duplicate the original mother micro-patterns onto various work materials and to construct any tailored micro-textures for sensors and actuators. In the present paper, the high density oxygen plasma etching method is utilized to make micro-line and micro-groove patterns onto the DLC and diamond coatings. Our developing oxygen plasma etching system is introduced together with characterization on the plasma state during etching. In this quantitative plasma diagnosis, both the population of activated species and the electron and ion densities are identified through the emissive light spectroscopy and the Langmuir probe method. In addition, the on-line monitoring of the plasmas helps to describe the etching process. DLC coated WC (Co) specimen is first employed to describe the etching mechanism by the present method. Chemical Vapor Deposition (CVD) diamond coated WC (Co) is also employed to demonstrate the reliable capacity of the present high density oxygen plasma etching. This oxygen plasma etching performance is discussed by comparison of the etching rates.

Original languageEnglish
Article number2015015
JournalManufacturing Review
Volume2
DOIs
Publication statusPublished - 2015

Fingerprint

Plasma etching
Texturing
Molds
Diamonds
Etching
Carbon
Oxygen
Plasmas
Chemical vapor deposition
NEMS
Langmuir probes
Hard coatings
Diamond films
Protective coatings
MEMS
Actuators
Textures
Spectroscopy
Coatings
Electrons

Keywords

  • CVD-diamond
  • Diamond like carbon
  • Etching
  • Micro-texturing
  • Mold-dies
  • Oxygen plasma

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Micro-texturing into DLC/diamond coated molds and dies via high density oxygen plasma etching. / Yunata, Ersyzario Edo; Aizawa, Tatsuhiko.

In: Manufacturing Review, Vol. 2, 2015015, 2015.

Research output: Contribution to journalArticle

@article{f40b4bfaf4c54c589cf10b975ad68cbd,
title = "Micro-texturing into DLC/diamond coated molds and dies via high density oxygen plasma etching",
abstract = "Diamond-Like Carbon (DLC) and Chemical Vapor Deposition (CVD)-diamond films have been widely utilized not only as a hard protective coating for molds and dies but also as a functional substrate for bio-MEMS/NEMS. Micro-texturing into these hard coated molds and dies provides a productive tool to duplicate the original mother micro-patterns onto various work materials and to construct any tailored micro-textures for sensors and actuators. In the present paper, the high density oxygen plasma etching method is utilized to make micro-line and micro-groove patterns onto the DLC and diamond coatings. Our developing oxygen plasma etching system is introduced together with characterization on the plasma state during etching. In this quantitative plasma diagnosis, both the population of activated species and the electron and ion densities are identified through the emissive light spectroscopy and the Langmuir probe method. In addition, the on-line monitoring of the plasmas helps to describe the etching process. DLC coated WC (Co) specimen is first employed to describe the etching mechanism by the present method. Chemical Vapor Deposition (CVD) diamond coated WC (Co) is also employed to demonstrate the reliable capacity of the present high density oxygen plasma etching. This oxygen plasma etching performance is discussed by comparison of the etching rates.",
keywords = "CVD-diamond, Diamond like carbon, Etching, Micro-texturing, Mold-dies, Oxygen plasma",
author = "Yunata, {Ersyzario Edo} and Tatsuhiko Aizawa",
year = "2015",
doi = "10.1051/mfreview/2015015",
language = "English",
volume = "2",
journal = "Manufacturing Review",
issn = "2265-4224",
publisher = "EDP Sciences",

}

TY - JOUR

T1 - Micro-texturing into DLC/diamond coated molds and dies via high density oxygen plasma etching

AU - Yunata, Ersyzario Edo

AU - Aizawa, Tatsuhiko

PY - 2015

Y1 - 2015

N2 - Diamond-Like Carbon (DLC) and Chemical Vapor Deposition (CVD)-diamond films have been widely utilized not only as a hard protective coating for molds and dies but also as a functional substrate for bio-MEMS/NEMS. Micro-texturing into these hard coated molds and dies provides a productive tool to duplicate the original mother micro-patterns onto various work materials and to construct any tailored micro-textures for sensors and actuators. In the present paper, the high density oxygen plasma etching method is utilized to make micro-line and micro-groove patterns onto the DLC and diamond coatings. Our developing oxygen plasma etching system is introduced together with characterization on the plasma state during etching. In this quantitative plasma diagnosis, both the population of activated species and the electron and ion densities are identified through the emissive light spectroscopy and the Langmuir probe method. In addition, the on-line monitoring of the plasmas helps to describe the etching process. DLC coated WC (Co) specimen is first employed to describe the etching mechanism by the present method. Chemical Vapor Deposition (CVD) diamond coated WC (Co) is also employed to demonstrate the reliable capacity of the present high density oxygen plasma etching. This oxygen plasma etching performance is discussed by comparison of the etching rates.

AB - Diamond-Like Carbon (DLC) and Chemical Vapor Deposition (CVD)-diamond films have been widely utilized not only as a hard protective coating for molds and dies but also as a functional substrate for bio-MEMS/NEMS. Micro-texturing into these hard coated molds and dies provides a productive tool to duplicate the original mother micro-patterns onto various work materials and to construct any tailored micro-textures for sensors and actuators. In the present paper, the high density oxygen plasma etching method is utilized to make micro-line and micro-groove patterns onto the DLC and diamond coatings. Our developing oxygen plasma etching system is introduced together with characterization on the plasma state during etching. In this quantitative plasma diagnosis, both the population of activated species and the electron and ion densities are identified through the emissive light spectroscopy and the Langmuir probe method. In addition, the on-line monitoring of the plasmas helps to describe the etching process. DLC coated WC (Co) specimen is first employed to describe the etching mechanism by the present method. Chemical Vapor Deposition (CVD) diamond coated WC (Co) is also employed to demonstrate the reliable capacity of the present high density oxygen plasma etching. This oxygen plasma etching performance is discussed by comparison of the etching rates.

KW - CVD-diamond

KW - Diamond like carbon

KW - Etching

KW - Micro-texturing

KW - Mold-dies

KW - Oxygen plasma

UR - http://www.scopus.com/inward/record.url?scp=84959327543&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84959327543&partnerID=8YFLogxK

U2 - 10.1051/mfreview/2015015

DO - 10.1051/mfreview/2015015

M3 - Article

AN - SCOPUS:84959327543

VL - 2

JO - Manufacturing Review

JF - Manufacturing Review

SN - 2265-4224

M1 - 2015015

ER -