Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation.

M. Yoshitake, T. Akhadejdamrong, T. Aizawa, K. Yoshihara

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)698-702
JournalSurface and Interface Analysis.
Volume34 (2002)
Publication statusPublished - 1800

Cite this

Yoshitake, M., Akhadejdamrong, T., Aizawa, T., & Yoshihara, K. (1800). Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation. Surface and Interface Analysis., 34 (2002), 698-702.

Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation. / Yoshitake, M.; Akhadejdamrong, T.; Aizawa, T.; Yoshihara, K.

In: Surface and Interface Analysis., Vol. 34 (2002), 1800, p. 698-702.

Research output: Contribution to journalArticle

Yoshitake, M, Akhadejdamrong, T, Aizawa, T & Yoshihara, K 1800, 'Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation.', Surface and Interface Analysis., vol. 34 (2002), pp. 698-702.
Yoshitake M, Akhadejdamrong T, Aizawa T, Yoshihara K. Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation. Surface and Interface Analysis. 1800;34 (2002):698-702.
Yoshitake, M. ; Akhadejdamrong, T. ; Aizawa, T. ; Yoshihara, K. / Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation. In: Surface and Interface Analysis. 1800 ; Vol. 34 (2002). pp. 698-702.
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