Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation.

M. Yoshitake, T. Akhadejdamrong, T. Aizawa, K. Yoshihara

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)698-702
JournalSurface and Interface Analysis.
Volume34 (2002)
Publication statusPublished - 1800

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Yoshitake, M., Akhadejdamrong, T., Aizawa, T., & Yoshihara, K. (1800). Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation. Surface and Interface Analysis., 34 (2002), 698-702.