Microbeam complex at TIARA

Technologies to meet a wide range of applications

T. Kamiya, K. Takano, T. Satoh, Y. Ishii, Hiroyuki Nishikawa, S. Seki, M. Sugimoto, S. Okumura, M. Fukuda

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Since 1990 R&Ds of microbeam technology has been progressed at the TIARA facility of JAEA Takasaki. In order to meet a wide variety of ion beam applications, analysis, radiation effect studies, or fabrication in regions of micro- or nano-structures, three different types of ion microbeam systems were developed. In these systems, high-spatial resolutions have been achieved and techniques of micro-PIXE, single ion hit and particle beam writing (PBW) were also developed for these applications. Microbeams, on the other hand, require the highest quality of beams from the accelerators, the cyclotron in particular, which was an important part of the microbeam technology of TIARA. In this paper, the latest progress of the ion microbeam technology and applications are summarized and a future prospect of them is discussed.

Original languageEnglish
Pages (from-to)2184-2188
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume269
Issue number20
DOIs
Publication statusPublished - 2011 Oct 15

Fingerprint

microbeams
Ion beams
Particle beams
Radiation effects
Ions
Cyclotrons
Particle accelerators
ion beams
particle beams
Fabrication
radiation effects
Microstructure
cyclotrons
ions
accelerators
spatial resolution
microstructure
fabrication
high resolution

Keywords

  • Accelerator
  • Ion microbeam
  • Micro-PIXE
  • PBW
  • Single ion hit
  • TIARA

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

Cite this

Microbeam complex at TIARA : Technologies to meet a wide range of applications. / Kamiya, T.; Takano, K.; Satoh, T.; Ishii, Y.; Nishikawa, Hiroyuki; Seki, S.; Sugimoto, M.; Okumura, S.; Fukuda, M.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 269, No. 20, 15.10.2011, p. 2184-2188.

Research output: Contribution to journalArticle

Kamiya, T. ; Takano, K. ; Satoh, T. ; Ishii, Y. ; Nishikawa, Hiroyuki ; Seki, S. ; Sugimoto, M. ; Okumura, S. ; Fukuda, M. / Microbeam complex at TIARA : Technologies to meet a wide range of applications. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2011 ; Vol. 269, No. 20. pp. 2184-2188.
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