Micromachined planar coil tactile sensor implantable in soft structure

Nobuyuki Futai, Takashi Yasuda, Masayuki Inaba, Isao Shimoyama, Hirochika Inoue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


This paper describes design and fabrication of a small, thin and deformable tactile sensing unit including micromachined LC trap circuitry. One tactile sensing element consists of a capacitor and a planar spiral coil. Each element has own resonance frequency, and small deformation of the coil in the element is detected by measuring its frequency deviation. Only three wires are necessary to obtain signals from multiple sensing elements. Since the sensing elements do not need any substrate, they can be implanted in soft material. A prototype array of the sensing elements has been fabricated and tested. Seven-turn coils 1.5 mm in diameter have been obtained. Range of the resonance frequencies of the fabricated elements is 50 MHz - 170 MHz. Using a silicone rubber body in which a sensing element is embedded, push-in depth values are detected by resonance frequency deviations when a wax ball (3 mm in diameter) touches the silicone rubber body. On condition that the sensing element is embedded in standard silicone rubber, its frequency sensitivity is 0.15 %/mm. In the frequency band 50 - 400 MHz, the experiment shows that a simultaneous measurement of not less than 20 elements can be done.

Original languageEnglish
Title of host publicationMicro-Electro-Mechanical Systems (MEMS)
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages6
ISBN (Electronic)9780791819005
Publication statusPublished - 2000
Externally publishedYes
EventASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States
Duration: 2000 Nov 52000 Nov 10

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)


ConferenceASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000
Country/TerritoryUnited States

ASJC Scopus subject areas

  • Mechanical Engineering


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