Micromachined pyroelectric probe for non-contact thermal diagnostic systems

Kenji Suita, Motoaki Hara, Shinya Ishikawa, Katsuhiro Tanaka, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Abstract

This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

Original languageEnglish
Pages (from-to)95-102
Number of pages8
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Volume7
Issue number2
DOIs
Publication statusPublished - 2013
Externally publishedYes

Fingerprint

Infrared detectors
Diffraction patterns
Sol-gel process
Microscopic examination
Infrared radiation
Scanning
X ray diffraction
Sensors
Hot Temperature

Keywords

  • Cantilever
  • Infrared
  • MEMS
  • PZT
  • Sol-Gel

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

Cite this

Micromachined pyroelectric probe for non-contact thermal diagnostic systems. / Suita, Kenji; Hara, Motoaki; Ishikawa, Shinya; Tanaka, Katsuhiro; Nagasawa, Sumito; Kuwano, Hiroki.

In: Journal of Advanced Mechanical Design, Systems and Manufacturing, Vol. 7, No. 2, 2013, p. 95-102.

Research output: Contribution to journalArticle

Suita, Kenji ; Hara, Motoaki ; Ishikawa, Shinya ; Tanaka, Katsuhiro ; Nagasawa, Sumito ; Kuwano, Hiroki. / Micromachined pyroelectric probe for non-contact thermal diagnostic systems. In: Journal of Advanced Mechanical Design, Systems and Manufacturing. 2013 ; Vol. 7, No. 2. pp. 95-102.
@article{926c8363144e4bf89c3d124b231cf3c9,
title = "Micromachined pyroelectric probe for non-contact thermal diagnostic systems",
abstract = "This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.",
keywords = "Cantilever, Infrared, MEMS, PZT, Sol-Gel",
author = "Kenji Suita and Motoaki Hara and Shinya Ishikawa and Katsuhiro Tanaka and Sumito Nagasawa and Hiroki Kuwano",
year = "2013",
doi = "10.1299/jamdsm.7.95",
language = "English",
volume = "7",
pages = "95--102",
journal = "Journal of Advanced Mechanical Design, Systems and Manufacturing",
issn = "1881-3054",
publisher = "Japan Society of Mechanical Engineers",
number = "2",

}

TY - JOUR

T1 - Micromachined pyroelectric probe for non-contact thermal diagnostic systems

AU - Suita, Kenji

AU - Hara, Motoaki

AU - Ishikawa, Shinya

AU - Tanaka, Katsuhiro

AU - Nagasawa, Sumito

AU - Kuwano, Hiroki

PY - 2013

Y1 - 2013

N2 - This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

AB - This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

KW - Cantilever

KW - Infrared

KW - MEMS

KW - PZT

KW - Sol-Gel

UR - http://www.scopus.com/inward/record.url?scp=84878967540&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84878967540&partnerID=8YFLogxK

U2 - 10.1299/jamdsm.7.95

DO - 10.1299/jamdsm.7.95

M3 - Article

VL - 7

SP - 95

EP - 102

JO - Journal of Advanced Mechanical Design, Systems and Manufacturing

JF - Journal of Advanced Mechanical Design, Systems and Manufacturing

SN - 1881-3054

IS - 2

ER -