Micromachining of Polyimide Films by Proton Beam Writing

Y. Takeno, H. Nishikawa, H. Hayashi

Research output: Contribution to journalArticle

Cite this

@article{95dabc4d5bd347b6ab6fc1f192fcfb92,
title = "Micromachining of Polyimide Films by Proton Beam Writing",
author = "Y. Takeno and H. Nishikawa and H. Hayashi",
year = "2011",
month = "6",
day = "1",
language = "English",
journal = "International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011)",

}

TY - JOUR

T1 - Micromachining of Polyimide Films by Proton Beam Writing

AU - Takeno, Y.

AU - Nishikawa, H.

AU - Hayashi, H.

PY - 2011/6/1

Y1 - 2011/6/1

M3 - Article

JO - International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011)

JF - International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011)

ER -