Microporous Silica Membrane Prepared using TMOS/O3 CVD in Opposing Reactants Geometry

Suraj Gopalakrishnan, Kenta Ono, Mikihiro Nomura, Takashi Sugawara, Hiromitsu Takaba, Shin-ichi Nakao

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	3263-3266
Journal	Transactions of the Materials Research Society of Japan
Volume	29
Publication status	Published - 2004 Nov 1

Cite this

@article{79c92ec23b574ee9ba9e8d0adc4adade,

title = "Microporous Silica Membrane Prepared using TMOS/O3 CVD in Opposing Reactants Geometry",

author = "Suraj Gopalakrishnan and Kenta Ono and Mikihiro Nomura and Takashi Sugawara and Hiromitsu Takaba and Shin-ichi Nakao",

year = "2004",

month = nov,

day = "1",

language = "English",

volume = "29",

pages = "3263--3266",

journal = "Transactions of the Materials Research Society of Japan",

}

TY - JOUR

T1 - Microporous Silica Membrane Prepared using TMOS/O3 CVD in Opposing Reactants Geometry

AU - Gopalakrishnan, Suraj

AU - Ono, Kenta

AU - Nomura, Mikihiro

AU - Sugawara, Takashi

AU - Takaba, Hiromitsu

AU - Nakao, Shin-ichi

PY - 2004/11/1

Y1 - 2004/11/1

M3 - Article

VL - 29

SP - 3263

EP - 3266

JO - Transactions of the Materials Research Society of Japan

JF - Transactions of the Materials Research Society of Japan

ER -