Original language | English |
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Pages (from-to) | 3263-3266 |
Journal | Transactions of the Materials Research Society of Japan |
Volume | 29 |
Publication status | Published - 2004 Nov 1 |
Microporous Silica Membrane Prepared using TMOS/O3 CVD in Opposing Reactants Geometry
Suraj Gopalakrishnan, Kenta Ono, Mikihiro Nomura, Takashi Sugawara, Hiromitsu Takaba, Shin-ichi Nakao
Research output: Contribution to journal › Article › peer-review