Microporous Silica Membrane Prepared using TMOS/O3 CVD in Opposing Reactants Geometry

Suraj Gopalakrishnan, Kenta Ono, Mikihiro Nomura, Takashi Sugawara, Hiromitsu Takaba, Shin-ichi Nakao

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)3263-3266
JournalTransactions of the Materials Research Society of Japan
Volume29
Publication statusPublished - 2004 Nov 1

Cite this